Design and Fabrication of Polysilicon-based Piezoresistive Microcantilever For Biological Sensing

摘要

This paper describes the fabrication process of a piezoresistive microcantilever sensor that is used as a platform for biological sensing such as salivary amylase-activity. The 0.5μm-thick piezoresistive sensors are made on polysilicon-based cantilever beam. This surface micromachined microcantilever is based on silicon wafers and fabricated using 0.5pm CMOS process technology . The range of microcantilevers is 40-140 pm long, 0.5-1 μM thick, and 40 pm wide. The force sensitivity of implemented sensors ranges from 2-10Pa is corresponding to salivary amylase-activity adsorbed on the piezoresistive microcantilever.