In principle, adsorption of biological molecules on a functionalized surface of a microfabricated cantilever will cause audsurface stress and consequently the cantilever bending. In this work, four different type of polysilicon-based piezoresistiveudmicrocantilever sensors were designed to increase the sensitivity of the microcantilevers sensor because the forcesudinvolved is very small. The design and optimization was performed by using finite element analysis to maximize theudrelative resistance changes of the piezoresistors as a function of the cantilever vertical displacements. The resistivity ofudthe piezoresistivity microcantilevers was analyzed before and after dicing process. The maximum resistance changesudwere systematically investigated by varying the piezoresistor length. The results show that although the thickness ofudpiezoresistor was the same at 0.5 μm the resistance value was varied.
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