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A Statistical Approach for Measuring Dislocations In 2D Photonic Crystals

机译:一种测量2D光子晶体位错的统计方法

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In this paper, a comparison between the placement accuracy of lattice atoms in photonic crystal structures fabricated with different lithographic techniques is made. Using atomic force microscopy measurements and self-developed algorithms for calculating the holes position within less than 0.01nm error, we establish the statistical disorder within such devices.
机译:在本文中,制备了用不同光刻技术制造的光子晶体结构中晶格原子的放置精度的比较。使用原子力显微镜测量和自开发算法用于在小于0.01nm误差范围内计算孔位置,我们在这些设备内建立统计障碍。

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