The two-axis magnetostatic-drive single-crystal-Si micro scanner driven by back-side electroplating Ni film

机译：双轴磁静电驱动单晶-SI微扫描仪由后侧电镀Ni膜驱动

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摘要

A simple 2-mask process to realize a two-axis micro scanning mirror is presented. The scanning mirror is made of single-crystal-silicon, and Ni is electroplated at the backside of scanner to induce the magnetostatic driving force.

机译：提出了一个简单的2掩模过程，实现了两个轴微扫描镜。扫描镜由单晶硅制成，并且在扫描仪的背面电镀Ni以诱导磁静静电驱动力。

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《IEEE/LEOS International Conference on Optical MEMS and Nanophotonics》|2008年||共2页
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Chia-Pao Hsu; Wen-Chien Chen; Tsung-Lin Tang; Ming-Chuen Yip; Weiluen Fang;
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中图分类 TN29-53;
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1. Linearization of a two-axis MEMS scanner driven by vertical comb-drive actuators [J] . Jui-che Tsai, Li-Cheng Lu, Wei-Chi Hsu, Journal of Micromechanics and Microengineering . 2008,第1期

机译：由垂直梳状驱动器驱动的两轴MEMS扫描仪的线性化
2. Linearization of a two-axis MEMS scanner driven by vertical comb-drive actuators [J] . Tsai JC, Lu LC, Hsu WC, Journal of Micromechanics and Microengineering . 2008,第1期

机译：由垂直梳状驱动器驱动的两轴MEMS扫描仪的线性化
3. Design, Fabrication, and Characterization of a High Fill-Factor, Large Scan-Angle, Two-Axis Scanner Array Driven by a Leverage Mechanism [J] . Tsai J.-C., Wu M.C. Journal of Microelectromechanical Systems . 2006,第期

机译：杠杆机制驱动的高填充因子，大扫描角，两轴扫描仪阵列的设计，制造和表征
4. The two-axis magnetostatic-drive single-crystal-Si micro scanner driven by back-side electroplating Ni film [C] . Chia-Pao Hsu, Wen-Chien Chen, Tsung-Lin Tang, IEEE/LEOS International Conference on Optical MEMS and Nanophotonics . 2008

机译：双轴磁静电驱动单晶-SI微扫描仪由后侧电镀Ni膜驱动
5. Microstructure study of electroplated copper films for ULSI metal interconnections. [D] . Lee, Haebum. 2001

机译：用于ULSI金属互连的电镀铜膜的微观结构研究。
6. A Silicon Optical Bench-Based Forward-View Two-Axis Scanner for Microendoscopy Applications [O] . Dong Zheng, Dingkang Wang, YK Yoon, 2020

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7. Microstructure and Magnetic Properties of Electroplated Ni-Fe Permalloy Thin Films by Saccharin Concentration in Electrolytes [O] . Ho-Jun Lee, Won-Bae Bang, Ki-Min Hong, 2009

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The two-axis magnetostatic-drive single-crystal-Si micro scanner driven by back-side electroplating Ni film

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