Composition control of Bi{sub}2Sr{sub}2Ca{sub}(n-1)Cu{sub}nO{sub}y superconducting thin films by rf magnetron sputtering method

摘要

We deposited Bi{sub}2Sr{sub}2Ca{sub}1Cu{sub}2O{sub}y (Bi-2212) superconducting thin films on MgO substrates with or without Al{sub}2O{sub}3 particles by the rf magnetron spattering method. From the results, we found that optimum the distances between targets and substrates target-substrate distance, rf powers and substrate temperature for obtaining the Bi-2212 films on the MgO substrates were 5mm, 150W and 830°C, respectively. The Bi-2212 films were Bi-2212 single-phase and had the T{sub}c of about 54K. The particle size and the distribution density of Al{sub}2O{sub}3 were controlled by annealing temperature. The Bi-2212/Al{sub}2O{sub}3/MgO film showed Bi-2212 single-phase, whereas did not show zero-resistance.