Deposition of Bi/sub 2/Sr/sub 2/Ca/sub n-1/Cu/sub n/O/sub y/ (bi-based) superconducting thin films by rf magnetron sputtering method under external magnetic field

摘要

We deposited Bi/sub 2/Sr/sub 2/Ca/sub n-1/Cu/sub n/O/sub y/ (Bi-based) superconducting thin films by rf magnetron sputtering method under external magnetic field, and investigated the effect of the external magnetic field on the growth and the superconductivity of the thin films. From the results, we found that the superconducting transition temperatures (T/sub c/) of the Bi-based thin films were improved by applying the external magnetic field during film deposition. The thin film with the highest T/sub c/ was produced by this method and showed the zero-resistance by the about 70 K without any annealing processes.