PRODUCTION OF SUPERCONDUCTING THIN FILM OF BI-SR-CA-CU-O BY SPUTTERING

摘要

PURPOSE:To easily obtain a thin film superconducting at high temp. by carrying out sputtering with a pair of targets of a Bi-Sr-Ca-Cu-O compd. having the same compsn. or targets of Bi-Sr-Ca-Cu-O compds. having different compsns. CONSTITUTION:Powdery mixtures each consisting of Bi2O3, SrCO3, CaCO3 and CuO are sintered to obtain target materials having 1:1:1:1 atomic ratio of Bi:Sr: Ca:Cu, 3:5:1:6, 1:2:3:4 and 1:1:1:4, respectively. A pair of targets placed opposite to each other are produced with one or two of the materials. A superconducting thin film of a Bi-Sr-Ca-Cu-O compd. is formed on a substrate by AC sputtering with the targets having the same compsn. or different compsns.