'The Minifactory' - A cost-effective way for ramp-up production of microsystems

摘要

Regardless of the constantly increasing development of MEMS technologies based on two-dimensional structures there is still a significant need for micro products, which are to be assembled in a "conventional" manner from different 3D components and materials. The variety of customer driven technologies, the growing complexity and miniaturization of components and modules is driving the demand for efficient and economic manufacturing technologies as well as for high precision micro assembly automation.