AMORPHOUS CARBON FILM DEPOSITION BY MAGNETICALLY-DRIVEN SHUNTING ARC DISCHARGE

摘要

A magnetically driven shunting arc discharge as a pulsed metal/solid plasma source has been developed. The shunting arc plasma is generated around a carbon rod with a diameter of 2 mm and a length of 40 mm bridged between electrodes. The plasma is driven by the magnetic field generated by the arc current itself. The peak arc current with a sinusoidal waveform is 1.7 kA at a 20 μF capacitor charging voltage of 1 kV. The plasma was accelerated along the rail with average velocity of 4 km/sec in pressure range from 0.054 to 1.4 Pa, and went out towards a target set at 40 mm apart from the muzzle. The deposition rate of a carbon film was obtained to 100 nm for a process time of 1 min. The carbon film was in an amorphous state and a typical Raman spectrum with the D and G band was observed.