Characteristics of Buckled Bridges and Lifted Micromirror using Film Stress

机译：使用薄膜应力弯曲桥梁和升降微镜的特性

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In this paper, we have reported the use of buckled bridges for realizing the vertical comb drive actuators. The detailed characteristics of the buckled bridges and the lifted micromirror using film stress are also examined

机译：在本文中，我们已经报道了使用弯曲的桥梁来实现垂直梳驱动致动器。还检查了弯曲桥梁和抬起的微镜使用膜应力的详细特性

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《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》|2006年||共2页
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Sasaki M.; Hane K.; Briand D.; Noell W.; de Rooij N.;
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正文语种
中图分类自动化技术、计算机技术;
关键词
micro-optomechanical devices; microactuators; micromirrors; optical films; buckled bridges; film stress; lifted micromirror; vertical comb drive actuators;

机译：微型机械设备;微致动器;微镜;光学膜;扣桥;薄膜应力;提升的微镜;立式梳子驱动致动器;

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1. Combined effect of pressure and geometric imperfection on buckling of stressed thin films on substrates [J] . Sun Youhong, Wu Baisheng, Yu Yongping Acta Mechanica . 2015,第5期

机译：压力和几何缺陷对基板上受应力薄膜屈曲的综合影响
2. A simplified analysis on buckling of stressed and pressurized thin films on substrates [J] . Baisheng Wu, Yongping Yu Archive of Applied Mechanics . 2014,第2期

机译：基板上受压和受压薄膜屈曲的简化分析
3. Buckling of Stressed and Pressurized Thin Films on Substrates [J] . Eloi Dion, Jean Grilhe, Jerome Colin, Journal of Applied Mechanics: Transactions of the ASME . 2010,第4期

机译：基板上受压薄膜的屈曲
4. Characteristics of Buckled Bridges and Lifted Micromirror Using Film Stress [C] . M. Sasaki, K. Hane, D. Briand, IEEE/LEOS International Conference on Optical MEMs and their Applications . 2006

机译：使用薄膜应力弯曲桥梁和升降微镜的特性
5. Stress Relaxation Modulus of Polymer Thin Films Measured via Buckling-based Metrology [D] . Zhang, Zhanrui. 2018

机译：通过屈曲的计量测量的聚合物薄膜应力松弛模量
6. Characteristics of the Energetic Micro-initiator Through Integrating Al/Ni Nano-multilayers with Cu Film Bridge [O] . Yuxin Zhang, Hongchuan Jiang, Xiaohui Zhao, 2017

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7. Intrinsic Stress Control of Sol-Gel Derived PZT Films for Buckled Diaphragm Structures of Highly Sensitive Ultrasonic Microsensors [O] . Yamashita Kaoru, Nishiumi Taiki, Arai Kaito, 2015

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Characteristics of Buckled Bridges and Lifted Micromirror using Film Stress

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