掌桥科研
一站式科研服务平台
科技查新
收录引用
专题文献检索
外文数据库(机构版)
更多产品
首页
成为会员
我要充值
退出
我的积分:
中文会员
开通
中文文献批量获取
外文会员
开通
外文文献批量获取
我的订单
会员中心
我的包量
我的余额
登录/注册
文献导航
中文期刊
>
中文会议
>
中文学位
>
中国专利
>
外文期刊
>
外文会议
>
外文学位
>
外国专利
>
外文OA文献
>
外文科技报告
>
中文图书
>
外文图书
>
工业技术
基础科学
医药卫生
农业科学
教科文艺
经济财政
社会科学
哲学政法
其他
工业技术
基础科学
医药卫生
农业科学
教科文艺
经济财政
社会科学
哲学政法
其他
自然科学总论
数学、物理、化学、力学
天文学、地球科学
生物科技
医学、药学、卫生
航空航天、军事
农林牧渔
机械、仪表工业
化工、能源
冶金矿业
电子学、通信
计算机、自动化
土木、建筑、水利
交通运输
轻工业技术
材料科学
电工技术
一般工业技术
环境科学、安全科学
图书馆学、情报学
社会科学
其他
马克思主义、列宁主义、毛泽东思想、邓小平理论
哲学、宗教
社会科学总论
政治、法律
军事
经济
文化、科学、教育、体育
语言、文字
文学
艺术
历史、地理
自然科学总论
数理科学和化学
天文学、地球科学
生物科学
医药、卫生
农业科学
工业技术
交通运输
航空、航天
环境科学、安全科学
综合性图书
自然科学总论
数学、物理、化学、力学
天文学、地球科学
生物科技
医学、药学、卫生
航空航天、军事
农林牧渔
机械、仪表工业
化工、能源
冶金矿业
电子学、通信
计算机、自动化
土木、建筑、水利
交通运输
轻工业技术
材料科学
电工技术
一般工业技术
环境科学、安全科学
图书馆学、情报学
社会科学
其他
自然科学总论
数学、物理、化学、力学
天文学、地球科学
生物科技
医学、药学、卫生
航空航天、军事
农林牧渔
机械、仪表工业
化工、能源
冶金矿业
电子学、通信
计算机、自动化
土木、建筑、水利
交通运输
轻工业技术
电工技术
一般工业技术
环境科学、安全科学
图书馆学、情报学
社会科学
其他
自然科学总论
数学、物理、化学、力学
天文学、地球科学
生物科技
医学、药学、卫生
航空航天、军事
农林牧渔
机械、仪表工业
化工、能源
冶金矿业
电子学、通信
计算机、自动化
土木、建筑、水利
交通运输
轻工业技术
材料科学
电工技术
一般工业技术
环境科学、安全科学
图书馆学、情报学
社会科学
其他
美国国防部AD报告
美国能源部DE报告
美国航空航天局NASA报告
美国商务部PB报告
外军国防科技报告
美国国防部
美国参联会主席指示
美国海军
美国空军
美国陆军
美国海军陆战队
美国国防技术信息中心(DTIC)
美军标
美国航空航天局(NASA)
战略与国际研究中心
美国国土安全数字图书馆
美国科学研究出版社
兰德公司
美国政府问责局
香港科技大学图书馆
美国海军研究生院图书馆
OALIB数据库
在线学术档案数据库
数字空间系统
剑桥大学机构知识库
欧洲核子研究中心机构库
美国密西根大学论文库
美国政府出版局(GPO)
加利福尼亚大学数字图书馆
美国国家学术出版社
美国国防大学出版社
美国能源部文献库
美国国防高级研究计划局
美国陆军协会
美国陆军研究实验室
英国空军
美国国家科学基金会
美国战略与国际研究中心-导弹威胁网
美国科学与国际安全研究所
法国国际关系战略研究院
法国国际关系研究所
国际宇航联合会
美国防务日报
国会研究处
美国海运司令部
北约
盟军快速反应部队
北约浅水行动卓越中心
北约盟军地面部队司令部
北约通信信息局
北约稳定政策卓越中心
美国国会研究服务处
美国国防预算办公室
美国陆军技术手册
一般OA
科技期刊论文
科技会议论文
图书
科技报告
科技专著
标准
其它
美国卫生研究院文献
分子生物学
神经科学
药学
外科
临床神经病学
肿瘤学
细胞生物学
遗传学
公共卫生&环境&职业病
应用微生物学
全科医学
免疫学
动物学
精神病学
兽医学
心血管
放射&核医学&医学影像学
儿科
医学进展
微生物学
护理学
生物学
牙科&口腔外科
毒理学
生理学
医院管理
妇产科学
病理学
生化技术
胃肠&肝脏病学
运动科学
心理学
营养学
血液学
泌尿科学&肾病学
生物医学工程
感染病
生物物理学
矫形
外周血管病
药物化学
皮肤病学
康复学
眼科学
行为科学
呼吸学
进化生物学
老年医学
耳鼻喉科学
发育生物学
寄生虫学
病毒学
医学实验室检查技术
生殖生物学
风湿病学
麻醉学
危重病护理
生物材料
移植
医学情报
其他学科
人类生活必需品
作业;运输
化学;冶金
纺织;造纸
固定建筑物
机械工程;照明;加热;武器;爆破
物理
电学
人类生活必需品
作业;运输
化学;冶金
纺织;造纸
固定建筑物
机械工程;照明;加热;武器;爆破
物理
电学
马克思主义、列宁主义、毛泽东思想、邓小平理论
哲学、宗教
社会科学总论
政治、法律
军事
经济
文化、科学、教育、体育
语言、文字
文学
艺术
历史、地理
自然科学总论
数理科学和化学
天文学、地球科学
生物科学
医药、卫生
农业科学
工业技术
交通运输
航空、航天
环境科学、安全科学
综合性图书
主题
主题
题名
作者
关键词
摘要
高级搜索 >
外文期刊
外文会议
外文学位
外国专利
外文图书
外文OA文献
中文期刊
中文会议
中文学位
中国专利
中文图书
外文科技报告
清除
历史搜索
清空历史
首页
>
外文会议
>
其他
>
IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference
IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference
召开年:
召开地:
出版时间:
-
会议文集:
-
会议论文
热门论文
全部论文
全选(
0
)
清除
导出
1.
Tunable Infrared Sensors 驴 Integration of MEMS with Semiconductor Detectors
机译:
可调谐红外传感器驴与半导体探测器的模拟
作者:
Dell J.M.
;
Musca C.A.
;
Antoszewski J.
;
Far L.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
infrared detectors;
micromachining;
micromechanical devices;
optical sensors;
optical tuning;
semiconductor devices;
125 degC;
2 hours;
MEMS;
microelectromechanical device;
semiconductor detector;
surface micromachining;
tunable detectors;
tunable infrared sensor;
2.
A New Method for Microlens Fabricated by a Heating Compressed Air Process
机译:
一种通过加热压缩空气制造的微透镜方法
作者:
Chewei Lin
;
Chingfu Tsou
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
heating;
microlenses;
moulding;
optical fabrication;
silicon;
surface roughness;
Si;
compressed air heating process;
microlens fabrication;
microlens molding;
silicon substrate;
surface roughness;
3.
Large Displacement Deformable Mirrors Made by Low Stress Polyimide Membrane
机译:
由低应力聚酰亚胺膜制成的大型位移可变形镜
作者:
Yu-Wei Yeh
;
Chen-Wei E. Chiu
;
Guo-Dung J. Su
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
Young's modulus;
adaptive optics;
deformation;
internal stresses;
micro-optomechanical devices;
micromirrors;
optical design techniques;
optical fabrication;
polymer films;
170 V;
Young's modulus;
deformation;
large displacement deformable mirrors;
low stress polyimi;
4.
Individually Tunable Silicon Bragg Reflectors
机译:
可单独调谐的硅布拉格反射器
作者:
Kone F.B.
;
Peter Y.-A.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
Bragg gratings;
distributed Bragg reflectors;
micro-optics;
optical design techniques;
optical fabrication;
optical filters;
optical tuning;
silicon-on-insulator;
microfabrication process;
silicon walls;
silicon-on-insulator wafer;
tunable optical filter;
tunable si;
5.
A Liquid Crystal Droplet Lens Driven by Dielectric Force
机译:
由介电力驱动的液晶液滴透镜
作者:
Chih-Cheng Cheng
;
Chang-Hua Liu
;
Yeh J.A.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
dielectric liquids;
lenses;
liquid crystals;
optical focusing;
optical materials;
optical tuning;
concentric electrodes;
dielectric force;
dielectric liquid;
focus tunable lens;
liquid crystal droplet lens;
shape-changed lens;
6.
Optical Switch using Thermo-Optic Effect of Micromachined Silicon Hemispheres
机译:
光开关使用微机械硅半球的热视光效应
作者:
Zhong T.
;
Zhang X.M.
;
Li J.
;
Liu A.Q.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
micro-optomechanical devices;
microswitches;
optical switches;
reliability;
thermo-optical effects;
mechanical movement;
micromachined silicon hemispheres;
micromechanical switches;
optical switch;
reliability;
thermo-optic effect;
total internal reflection;
7.
Design and Characterization of MEMS Micromirrors for Ion Trap Quantum Computation
机译:
离子陷阱量子计算MEMS微镜的设计与表征
作者:
Changsoon Kim
;
Knoernschild C.
;
Bin Liu
;
Jungsang Kim
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
micro-optomechanical devices;
micromirrors;
particle traps;
quantum computing;
MEMS micromirror;
free space Gaussian beams;
ion trap quantum computation;
8.
Integration of SOI and SU-8 in a Surface-Micromachining-like Process and Its Application in Micro-Optical Systems
机译:
SOI和SU-8在表面微机床的过程中的集成及其在微光学系统中的应用
作者:
Yi Chiu
;
Chung-Wei Wu
;
Zhi-Wei Zhuang
;
Jin-Chern Chiou
;
Han-Ping D. Shieh
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
integrated optics;
micro-optics;
micromachining;
optical fabrication;
photodetectors;
silicon-on-insulator;
SU-8 negative resist;
fabrication process;
mechanical structures;
microoptical system;
optical device;
oxide sacrificial layer;
photodetectors;
silicon-on-insu;
9.
GaSb-based Micro-Mechanical External-Cavity Laser Emitting around 2.3驴m
机译:
基于Gasb的微机械外腔激光发射左右2.3°M
作者:
Geerlings E.
;
Rattunde M.
;
Schmitz J.
;
Kaufel G.
;
Wagner J.
;
Kallweit D.
;
Zappe H.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
III-V semiconductors;
diffraction gratings;
gallium compounds;
laser cavity resonators;
micro-optomechanical devices;
micromachining;
quantum well lasers;
silicon;
2.3 micron;
GaSb;
GaSb-based micromechanical external-cavity laser;
Littrow-configuration;
Si;
electros;
10.
Rotary Comb Drive Actuator with an Optical Fiber Encoder
机译:
具有光纤编码器的旋转梳驱动致动器
作者:
Nagao S.
;
Oohira F.
;
Hosogi M.
;
Hashiguchi G.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
electrostatic actuators;
encoding;
micro-optomechanical devices;
optical fibres;
electrostatic comb drive actuator;
optical fiber encoder;
11.
Gimbaled 2D Scanning Mirror with Vertical Combs for Laser Display
机译:
带有垂直梳子的Gimbaled 2D扫描镜用于激光显示器
作者:
Young-Chul Ko
;
Jin-Ho Lee
;
Jin-Woo Cho
;
Yong-Hwa Park
;
Jun-O Kim
;
Yong-Chul Cho
;
Seok-Mo Chang
;
Hyun-Gu Jeong
;
Seok-Jin Kang
;
Seok-Whan Chung
;
Seong-Ho Shin
;
Sunu J.
;
Ji-Beom Yoo
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
laser mirrors;
micromirrors;
optical design techniques;
optical projectors;
optical scanners;
1 mm;
24 to 24.5 kHz;
2D image;
800 to 900 Hz;
eye-shaped frame;
gimbaled 2D scanning mirror;
horizontal scanning mirror;
laser display;
mechanical scanning;
single beam rast;
12.
Design and Fabrication of a MEMS X-ray Optic using Anisotropic Wet Etching of Si Wafers
机译:
使用Si晶片的各向异性湿法蚀刻MEMS X射线光学器件的设计和制造
作者:
Koshiishi M.
;
Ezoe Y.
;
Mita M.
;
Mitsuda K.
;
Takano T.
;
Maeda R.
;
Ishisaki Y.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
X-ray optics;
elemental semiconductors;
etching;
micro-optomechanical devices;
micromirrors;
optical design techniques;
optical fabrication;
silicon;
MEMS X-ray optics design;
MEMS X-ray optics fabrication;
Si;
X-ray mirrors;
anisotropic wet etching;
optics mount;
sil;
13.
Micromirror integrated with piezorestive rotation angle sensor for measuring small signal
机译:
微镜与压电旋转角度传感器集成,用于测量小信号
作者:
Tabata M.
;
Sasaki M.
;
Hane K.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
angular measurement;
micromirrors;
piezoresistive devices;
shear strength;
micromirror device;
mirror rotation;
piezoresistive rotation angle sensor;
sensor signal measurement;
shear gauge;
shear stress detection;
time-modulation method;
torsion bar;
14.
Fabrication and Testing of Nano-Photonic Quantum Dot Waveguides
机译:
纳米光子量子点波导的制造和测试
作者:
Chia-Jean Wang
;
Parviz B.A.
;
Lin L.Y.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
nanopatterning;
optical fabrication;
optical testing;
optical waveguides;
quantum dots;
self-assembly;
20 micron;
colloidal quantum dots;
nanophotonic quantum dot waveguides;
nanophotonic waveguides fabrication;
nanophotonic waveguides testing;
nanoscale optical wa;
15.
Design and Fabrication of Optical MEMS Scanners for Optically Modulated Fiber Endoscopes
机译:
光学MEMS用于光学调制光纤内窥镜的光学MEMS扫描仪的设计和制造
作者:
Nakada M.
;
Chong C.
;
Isamoto K.
;
Fujita H.
;
Toshiyoshi H.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
biomedical optical imaging;
endoscopes;
fibre optic sensors;
image scanners;
micro-optomechanical devices;
optical design techniques;
optical fabrication;
optical modulation;
optical scanners;
photovoltaic cells;
optical MEMS scanners design;
optical MEMS scanners;
16.
Digital Optical 1驴N MEMS Switch Utilizing Microassembled Rotating Micromirror
机译:
数字光学1驴n MEMS开关利用微型配件旋转微镜
作者:
Basha M.A.
;
Dechev N.
;
Safavi-Naeini S.
;
Chaudhuri S.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
micro-optomechanical devices;
microassembling;
micromirrors;
optical losses;
optical switches;
14.4 msec;
3D mirror;
coupling loss;
digital optical space MEMS switch;
electro-static rotary motor;
microassembled rotating micromirror;
robotic-based microassembly proc;
17.
Electrostatically-tuned Optical Filter Based on Silicon Bragg Reflectors
机译:
基于硅布拉格反射器的静电透明滤波器
作者:
Saadany B.
;
Malak M.
;
Marty F.
;
Mita Y.
;
Khalil D.
;
Bourouina T.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
Fabry-Perot resonators;
distributed Bragg reflectors;
electrostatic actuators;
elemental semiconductors;
micro-optomechanical devices;
optical fabrication;
optical filters;
optical testing;
optical tuning;
silicon;
silicon-on-insulator;
sputter etching;
Bragg mirror;
18.
Impact of Micromirror Seidel Aberrations on Microcavity Spectra
机译:
微镜Seidel像差对微腔谱的影响
作者:
Wei Liu
;
Talghader J.J.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
aberrations;
deformation;
infrared spectra;
microcavities;
micromirrors;
astigmatism;
coma;
microcavity spectra;
micromirror Seidel aberrations;
spectral curvature;
spectral tilt;
spherical aberration;
stress-induced deformation;
19.
A MEMS based Optical Coherence Tomography Imaging System and Optical Biopsy Probes for Real-Time, High Resolution In-Vivo and In-Vitro 2-D or 3-D Imaging
机译:
基于MEMS的基于光学相干断层扫描成像系统和用于实时,高分辨率内和体外2-D或3-D成像的光学活组织检查探针
作者:
McCormick D.T.
;
Woonggyu Jung
;
Yeh-Chan Ahn
;
Milanovic V.
;
Zhongping Chen
;
Tien N.C.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
bioMEMS;
biomedical optical imaging;
micro-optomechanical devices;
micromachining;
micromirrors;
optical tomography;
probes;
2-D imaging;
3-D imaging;
Fourier domain OCT system;
MEMS based OCT imaging system;
MEMS based imaging probes;
MEMS control architecture;
high;
20.
Opto-Mechanical Chaotic Behaviour of Micron-Scaled On-Chip Resonators
机译:
微米缩放片上谐振器的光机械混沌行为
作者:
Carmon T.
;
Cross M.C.
;
Vahala K.J.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
micro-optomechanical devices;
micromechanical resonators;
optical chaos;
radiation pressure;
vibrations;
chaotic oscillation;
micron scaled on-chip resonators;
on-chip oscillator;
opto-mechanical chaotic behaviour;
opto-mechanical vibration;
period-doubling;
power;
21.
Mass-Producible Nano and Microphotonic Devices and Systems
机译:
批量生产纳米和缩放装置和系统
作者:
Stuck A.
;
Schnieper M.
;
Obi S.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
diffraction gratings;
embossing;
integrated optics;
micro-optomechanical devices;
microlenses;
moulding;
optical fabrication;
optical filters;
optical polarisers;
replica techniques;
UV-embossing replica process;
antireflex gratings;
color filters;
grating polarizers;
22.
Endoscopic Microprobe with a LVD Microlens Scanner for Confocal Imaging
机译:
内窥镜微竞素,具有用于共焦成像的LVD微透镜扫描仪
作者:
Ankur Jain
;
Huikai Xie
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
bioMEMS;
biomedical optical imaging;
endoscopes;
image scanners;
micro-optomechanical devices;
microlenses;
optical microscopy;
probes;
0.7 mm;
23 V;
5 mm;
MEMS scanner;
confocal imaging;
confocal microscopy;
endoscopic microprobe;
endoscopic probe;
integrated polymer m;
23.
An All Silicon Micro-Machined Add-Drop Optical Filter
机译:
全硅微加工加液滤光片
作者:
Saadany B.
;
Khalil D.
;
Malak M.
;
Kubota M.
;
Marty F.
;
Mita Y.
;
Bourouina T.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
distributed Bragg reflectors;
elemental semiconductors;
micro-optomechanical devices;
micromachining;
optical communication equipment;
optical fabrication;
optical filters;
optical testing;
silicon;
sputter etching;
wavelength division multiplexing;
Bragg mirror;
Si;
24.
Growth of GaN Quantum Well Film on Si Substrate and Its Application to a GaN-Si Hybrid Lightning Device
机译:
Si衬底上GaN量子孔膜的生长及其在GaN-Si杂交闪电装置上的应用
作者:
Hu F.R.
;
Ito R.
;
Zhao Y.
;
Kanamori Y.
;
Hane K.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
III-V semiconductors;
gallium compounds;
indium compounds;
light emitting diodes;
light sources;
micro-optomechanical devices;
microactuators;
nanopatterning;
optical fabrication;
photoluminescence;
semiconductor growth;
semiconductor quantum wells;
semiconductor th;
25.
Single-Crystal-Silicon Continuous Membrane Deformable Mirror Array for Adaptive Optics
机译:
用于自适应光学的单晶硅连续膜可变形镜阵列
作者:
Il Woong Jung
;
Peter Y.
;
Carr E.
;
Jen-Shiang Wang
;
Solgaard O.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
adaptive optics;
membranes;
micromechanical devices;
micromirrors;
optical arrays;
optical fabrication;
silicon-on-insulator;
space research;
telescopes;
100 V;
125 nm;
25 kHz;
Si;
adaptive optics;
deformable mirror array;
optical surface quality;
resonance frequency;
si;
26.
Electrowetting-Based Total Internal Reflection Chip for Optical Switch and Display
机译:
基于电润湿的光开关和显示器的全内反射芯片
作者:
Heng-Cang Hu
;
Chih-Sheng Yu
;
Yi-Chiuen Hu
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
light reflection;
micro-optics;
micro-optomechanical devices;
microdisplays;
microswitches;
optical switches;
wetting;
EWOD;
electrode;
electrowetting-based total internal reflection chip;
electrowetting-on-dielectric-layer;
insulating film;
micro droplet;
optical di;
27.
Silicon-Based On-Chip Micromirrors for DWDM Wavelength-Selective Crossconnects
机译:
基于硅的片上微镜,用于DWDM波长选择性交叉连接
作者:
Chao-Hsi Chi
;
Chenlu Hou
;
Chi-Hung Lee
;
Dooyoung Hah
;
Wu M.C.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
channel spacing;
elemental semiconductors;
micro-optomechanical devices;
microactuators;
micromirrors;
optical interconnections;
optical switches;
silicon;
wavelength division multiplexing;
100 GHz;
75 micron;
DWDM grids;
MEMS;
channel spacing;
comb-drive actuator;
mon;
28.
High Fill-Factor Paraboloidal Microlens Arrays
机译:
高填充因子抛物面微透镜阵列
作者:
Sung-Il Chang
;
Joo-Hyung Lee
;
Jun-Bo Yoon
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
electroplating;
integrated optics;
microlenses;
optical arrays;
optical fabrication;
optical polymers;
photoresists;
replica techniques;
ultraviolet lithography;
3-D diffuser lithography;
MESD technology;
UV light;
copper intermediate mold;
electroplating;
fabrication;
29.
Monolithic Integration of Piezoelectric Cantilever in Tunable VCSEL
机译:
调谐VCSEL中压电悬臂的单片集成
作者:
Kan Bun Cheng
;
Huang M.C.Y.
;
Ye Zhou
;
Alvaro S.P.
;
Chang-Hasnain C.J.
;
Pisano A.P.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
cantilevers;
laser cavity resonators;
laser tuning;
monolithic integrated circuits;
optical design techniques;
optical fabrication;
piezoelectric actuators;
surface emitting lasers;
3 nm;
monolithic integration;
piezoelectric actuated cantilever beam;
single mode e;
30.
High-Reflectivity Two-Axis Vertical Comb Drive Microscanners for Confocal Imaging Applications
机译:
高反射率两轴垂直梳状传动微牵动器,用于共聚焦成像应用
作者:
Kumar K.
;
Hoshino K.
;
Hyun-Joon Shin
;
Richards-Kortum R.
;
Xiaojing Zhang
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
biomedical optical imaging;
cellular biophysics;
elemental semiconductors;
image scanners;
micromirrors;
optical fabrication;
optical scanners;
reflectivity;
silicon;
silicon-on-insulator;
1.87 KHz;
633 nm;
Si;
Si-SiOlt;
subgt;
2lt;
/subgt;
bonded SOI-Si wafers;
metal-coated sca;
31.
Micromirror with Thin Film Torsion Bar and Vertical Comb using Tensile Poly-Si
机译:
微镜用薄膜扭转杆和使用拉伸聚乙烯的垂直梳
作者:
Fujishima M.
;
Sasaki M.
;
Hane K.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
electrostatic actuators;
micro-optomechanical devices;
micromirrors;
Si;
electrostatic driving;
micromirror;
tensile poly-Si thin film;
thermal expansion coefficient;
thin film torsion bar;
vertical comb;
32.
Plastic-Type OPLEAF as High Density Fiber Array for Minimized Lateral Device Spacing Optical ICs
机译:
塑料型Opleaf作为高密度光纤阵列,用于最小化的横向装置间距光学IC
作者:
Sonobe T.
;
Hiroi N.
;
Takenaka M.
;
Nakano Y.
;
Fujita H.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
integrated optoelectronics;
mass production;
micro-optics;
optical arrays;
optical fibre fabrication;
high-density optical fiber array;
mass production;
minimized lateral device spacing;
optical IC;
plastic-type OPLEAf;
33.
Micromirror Array of Monocrystalline Silicon
机译:
单晶硅微镜阵列
作者:
Bakke T.
;
Volker B.
;
Friedrichs M.
;
Rudloff D.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
creep;
elasticity;
elemental semiconductors;
micromirrors;
silicon;
creep free actuation;
elasticity;
micromirror array;
monocrystalline silicon;
stress gradients;
unsurpassed planarity;
34.
Vertical Resonant Comb Actuators for Fourier Transform Spectroscopy
机译:
用于傅立叶变换光谱的垂直谐振梳致动器
作者:
Ataman C.
;
Ure H.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
Fourier transform spectrometers;
diffraction gratings;
electrostatic actuators;
infrared spectrometers;
micro-optomechanical devices;
visible spectrometers;
1.2 KHz;
106 micron;
28 V;
3 mm;
Fourier transform spectroscopy;
MEMS;
aperture device;
electrostatic comb dri;
35.
Monolithic Bi-directional Linear Microactuator for Light Beam Manipulation
机译:
用于光束操作的单片双向线性微循环
作者:
Hao-Der Cheng
;
Sheng-Yi Hsiao
;
Mingching Wu
;
Weileun Fang
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
micro-optomechanical devices;
microactuators;
optical fabrication;
silicon-on-insulator;
SOI wafer;
Si-SiOlt;
subgt;
2lt;
/subgt;
light beam manipulation;
monolithic bi-directional linear microactuator;
36.
Stiction-Free Soft Landing for Infrared Thermal Detectors
机译:
红外热检测器无斜柔软着陆
作者:
Yuyan Wang
;
Talghader J.J.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
electrostatic actuators;
infrared detectors;
micro-optomechanical devices;
micromachining;
stiction;
adaptive thermal detectors;
electrostatic actuation;
infrared thermal detectors;
mechanical response time;
micromachined structures;
stiction-free soft landing;
37.
Nanolaminate Deformable Mirrors
机译:
纳米胺酸可变形镜
作者:
Papavasiliou A.P.
;
Olivier S.S.
;
Barbee T.W.
;
Miles R.R.
;
Walton C.C.
;
Cohn M.B.
;
Chang K.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
electrostatic actuators;
foils;
laminates;
micro-optomechanical devices;
mirrors;
nanostructured materials;
MEMS-like structures;
densely-spaced deflections;
electrostatic actuation;
electrostatic forces;
high-spatial-density electrostatic actuators;
lightweight na;
38.
Tailored Stress in InP/GaInAs Layers for InP/Air-Gap DBR-Filters with Photonic Crystals
机译:
用于INP / GAINAS层的定制应力,用于具有光子晶体的INP / Air-Gap DBR过滤器
作者:
Kusserow T.
;
Dharmarasu N.
;
Hillmer H.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
III-V semiconductors;
compensation;
distributed Bragg reflectors;
gallium arsenide;
gallium compounds;
indium compounds;
internal stresses;
light interferometry;
micro-optomechanical devices;
optical fabrication;
optical films;
optical filters;
optical testing;
photo;
39.
Charcterization and Manipulation of Light Confinement in a Microcavity using Scanning Probe Technology
机译:
使用扫描探头技术表征和操纵微腔中的光限制
作者:
Sandoghdar V.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
micro-optics;
microcavities;
near-field scanning optical microscopy;
photonic crystals;
whispering gallery modes;
flow manipulation;
high-Q photonic crystal;
light confinement manipulation;
microcavity;
optical energy;
scanning near-field optical microscopy;
scanni;
40.
In-Line Fiber Optic Chemical Sensor with Gold Coated, Self-Aligned Epoxy Waveguide
机译:
用金涂层,自对准环氧树脂波导的在线光纤化学传感器
作者:
Sung-Sik Yun
;
Jong-Hyun Lee
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
chemical sensors;
chemical variables measurement;
fibre optic sensors;
chemical concentration;
gold coated self-aligned epoxy waveguide;
in-line fiber optic chemical sensor;
41.
Spatial Light Modulators for Maskless Lithography
机译:
无掩模光刻的空间光调制器
作者:
Il Woong Jung
;
Jen-Shiang Wang
;
Solgaard O.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
micromirrors;
optical arrays;
optical design techniques;
optical fabrication;
optical images;
photolithography;
pistons;
spatial light modulators;
564 kHz;
aerial image generation;
maskless lithography;
micromirrors;
mirror arrays;
optical fabrication;
piston-type spa;
42.
Wavelength-Selective 1x4 Switch for Switching Groups of 8 Channels with a Linked Micromirror Array
机译:
波长选择性1x4开关,用于开关8个通道的组,带有链接的微镜阵列
作者:
Marom D.M.
;
Lopez D.
;
Pardo F.
;
Klemens F.
;
Bower E.
;
Ferry E.
;
Aksyuk V.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
micro-optomechanical devices;
micromirrors;
optical arrays;
optical communication;
optical switches;
wavelength division multiplexing;
MEMS micromirror array;
WDM channels;
high-voltage driving circuits;
linked mirrors;
optical networking;
switching groups;
waveleng;
43.
One Megapixel SLM with High Optical Fill Factor and Low Creep Actuators
机译:
具有高光学填充因子和低蠕变执行器的一台百万像素SLM
作者:
Friedrichs M.
;
Schmidt J.
;
Duerr P.
;
Bakke T.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
CMOS integrated circuits;
integrated optics;
integrated optoelectronics;
micro-optomechanical devices;
microactuators;
micromirrors;
monolithic integrated circuits;
spatial light modulators;
CMOS;
mechanical creep actuators;
megapixel SLM;
micromirror;
monolithicall;
44.
Two Dimensional MEMS Piston Array for DUV Optical Pattern Generation
机译:
用于DUV光学图案生成的二维MEMS活塞阵列
作者:
Lopez D.
;
Aksyuk V.
;
Watson G.
;
Simon M.E.
;
Mansfield W.
;
Klemens F.
;
Cirelli R.
;
Ferry E.
;
Papazian A.
;
Pardo F.
;
Bolle C.
;
Basavanhally N.
;
Bower J.
;
Miner J.
;
Sorsch T.
;
Tennan D.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
micro-optomechanical devices;
micromirrors;
optical arrays;
optical design techniques;
optical fabrication;
pistons;
DUV;
MEMS piston mirrors;
deep ultraviolet radiation;
mask pattern generation;
optical design;
optical fabrication;
optical pattern generation;
two di;
45.
MEMS Scanning Diffraction Grating Spectrometer
机译:
MEMS扫描衍射光栅光谱仪
作者:
Kim B.
;
Sinibaldi J.
;
Karunasiri G.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
diffraction gratings;
gas lasers;
helium;
infrared spectrometers;
micro-optomechanical devices;
micromachining;
neon;
visible spectrometers;
He-Ne;
HeNe laser source;
MEMS;
grating spectroscopy;
micromachined scanning diffraction grating spectrometer;
spectroscopy re;
46.
Nanoimprint Patterned Aluminum Photonic Grating for Refractive Index Measurement
机译:
纳米印刷图案铝光学光栅用于折射率测量
作者:
Skinner J.L.
;
Hunter L.L.
;
Talin A.A.
;
Provine J.
;
Horsley D.A.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
aluminium;
diffraction gratings;
nanolithography;
nanopatterning;
optical testing;
refractive index measurement;
soft lithography;
aluminum film;
aluminum photonic grating;
fluid refractive index;
nanoimprint lithography;
nanoimprint pattern;
optical modes;
optical t;
47.
Deep-trench vertical si photodiode towards active-device integrated OMEMS
机译:
深沟垂直SI光电二极管朝向主动装置集成OMEM
作者:
Hirose K.
;
Mita Y.
;
Kuhota M.
;
Shi T.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
electro-optical devices;
elemental semiconductors;
etching;
integrated optoelectronics;
micro-optomechanical devices;
optical fabrication;
photodiodes;
silicon;
40 micron;
Si;
active electro-optical devices;
active-device integrated optical MEMS;
deep-trench vertica;
48.
Nanoscale High-Contrast Subwavelength Grating Integrated Tunable Surface Emitting Laser
机译:
纳米级高对比度亚波长光栅集成可调表面发射激光器
作者:
Huang M.C.Y.
;
Ye Zhou
;
Chang-Hasnain C.J.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
diffraction gratings;
laser cavity resonators;
laser tuning;
nanotechnology;
surface emitting lasers;
293 to 298 K;
CW operation;
NEMS;
continuous tuning;
electrostatic actuated nanoelectromechanical system;
integrated tunable surface emitting laser;
single mode em;
49.
Grating Light Valve Projector
机译:
光栅光阀投影仪
作者:
Kubota S.R.
;
Taguchi A.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
diffraction gratings;
electro-optical modulation;
fluctuations;
light valves;
optical projectors;
thermo-optical effects;
grating light valve projector;
light intensity modulation;
membrane displacement;
thermally excited random fluctuation;
50.
>1GHz Optically Excited Vibrations of a Micron-Scale On-Chip Sphere
机译:
> 1GHz光学兴奋的芯片片上的振动振动
作者:
Carmon T.
;
Vahala K.J.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
micro-optomechanical devices;
microcavities;
photoexcitation;
quantum optics;
radiation pressure;
vibrational modes;
mechanical eigen-modes;
mechanical oscillation;
on-chip micron-scale sphere;
optical excited vibrations;
radiation pressure;
spherical microcavity;
51.
Light-Actuated Push/Pull Manipulation of Liquid Droplets
机译:
液滴的亮起推/拉操纵
作者:
Krogmann F.
;
Hong Qu
;
Moench W.
;
Zappe H.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
drops;
micro-optomechanical devices;
microlenses;
optical arrays;
optical design techniques;
wetting;
MEMS;
light-actuated push-pull manipulation;
liquid droplets;
opto-electrowetting system;
two-dimensional liquid microlens arrays design;
52.
MEMS Based Dual-axes Confocal Reflectance Handheld Microscope for in vivo Imaging
机译:
基于MEMS的双轴共聚焦反射率手持式显微镜用于体内成像
作者:
Piyawattanametha W.
;
Liu J.T.C.
;
Mandella M.J.
;
Ra H.
;
Wong L.K.
;
Hsiung P.
;
Wang T.D.
;
Kino G.S.
;
Solgaard O.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
bioMEMS;
biomedical optical imaging;
image scanners;
micro-optomechanical devices;
optical microscopy;
1.1 kHz;
3.54 kHz;
FWHM;
barbell-shaped scanner;
dual-axes confocal reflectance handheld microscope;
full-width-half-maximum;
in vivo imaging;
optical scan angles;
53.
Micromechanically Widely Tunable VCSEL for Absorption Spectroscopy at around 1.55驴m
机译:
用于吸收光谱的微机械方式广泛调谐VCSEL,约为1.55°M
作者:
Kogel B.
;
Halbritter H.
;
Lackner M.
;
Schwarzott M.
;
Maute M.
;
Amann M.-C.
;
Winter F.
;
Meissner P.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
carbon compounds;
infrared spectroscopy;
laser cavity resonators;
laser tuning;
measurement by laser beam;
micro-optomechanical devices;
surface emitting lasers;
51 nm;
COlt;
subgt;
2lt;
/subgt;
MEMS-VCSEL;
absorption spectroscopy;
all fiber based remote measurement;
continuo;
54.
Silicon Microtoroidal Resonators with Integrated MEMS Tunable Optical Coupler
机译:
具有集成MEMS可调谐光耦合器的硅微观谐振器
作者:
Jin Yao
;
Leuenberger D.
;
Ming-Chang M. Lee
;
Wu M.C.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
elemental semiconductors;
integrated optics;
micro-optomechanical devices;
micromechanical resonators;
optical couplers;
optical resonators;
optical tuning;
silicon;
coupling coefficient;
crystalline silicon microtoroidal resonators;
integrated MEMS tunable optica;
55.
Integrated FET-Polysilicon Micromachining Process for Optical MEMS
机译:
光学模型的集成FET-多晶硅微机械加工过程
作者:
Cowan W.D.
;
Resnick P.J.
;
Okandan M.
;
Spahn O.B.
;
Dagel D.J.
;
Grossetette G.D.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
field effect transistors;
micro-optomechanical devices;
micromachining;
micromirrors;
SUMMiTtrade process;
co-fabricated transistors;
drive circuitry;
electrical performance;
integrated FET-polysilicon micromachining process;
micromirror arrays;
optical MEMS;
optic;
56.
Surface Plasmon Optics
机译:
表面等离子体光学
作者:
Christ A.
;
Leveque G.
;
Fischer H.
;
Nesci A.
;
Tikhodeev S.G.
;
Martin O.J.F.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
micro-optomechanical devices;
nanowires;
surface plasmon resonance;
MEMS;
metal nanostructures;
nanowire arrays;
optical frequencies;
optical properties;
surface plasmon modes delocalization;
surface plasmon modes localization;
surface plasmon optics;
57.
Integrated Micro-Displacement Sensor that can Measure Tilting or Linear Motion for an External Mirror
机译:
集成的微位移传感器,可以测量外部镜子的倾斜或线性运动
作者:
Sawada R.
;
Higurashi E.
;
Sanada S.
;
Chino D.
;
Ishikawa I.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
angular measurement;
integrated optics;
micro-optomechanical devices;
micromirrors;
microsensors;
motion measurement;
optical sensors;
photodiodes;
semiconductor lasers;
surface emitting lasers;
1 mm;
1.5 mm;
VCSEL;
beam divergence;
external mirror;
integrated optical;
58.
Piezoelectric Deformable MEMS Mirror for Adaptive Optics Composed of PZT Thin Films
机译:
用于自适应光学器件的压电可变形MEMS镜,由PZT薄膜组成
作者:
Kanno I.
;
Kunisawa T.
;
Kotera H.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
Zernike polynomials;
adaptive optics;
aluminium;
etching;
measurement by laser beam;
micromirrors;
piezoelectric thin films;
silicon-on-insulator;
vibration measurement;
10 V;
15 mm;
Al;
PZT;
PZT thin films;
PbZrO3TiO3;
SOI substrate;
Si-SiOlt;
subgt;
2lt;
/subgt;
Zernike modes;
Ze;
59.
A Large Rotation Angle Electrothermal Micromirror with Integrated Platinum Heater
机译:
具有集成铂加热器的大型旋转角电热微镜
作者:
Lei Wu
;
Huikai Xie
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
elemental semiconductors;
micro-optomechanical devices;
micromirrors;
optical design techniques;
platinum;
silicon;
12.5 V;
336 Hz;
integrated platinum heater;
single-crystal-silicon electrothermal micromirror;
60.
Characterization of Silicon Nitride Micromachined Beams via Remote Optical Interrogation
机译:
通过远程光学询问的氮化硅微机械光束的表征
作者:
Shelton W.A.
;
Muth J.F.
;
Holland J.L.
;
Lunardi L.M.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
Fabry-Perot interferometers;
laser cavity resonators;
measurement by laser beam;
micro-optics;
micromachining;
micromechanical devices;
silicon compounds;
Fabry-Perot interferometry;
SiN;
absolute displacement;
mechanical mode characterization;
micromachined double;
61.
High Fill-Factor Arrays of Flexure Hinge Type Micromirrors for Multi Object Spectroscopy
机译:
用于多目标光谱的挠性铰链型微镜高填充系数阵列
作者:
Waldis S.
;
Clerc P.-A.
;
Noell W.
;
Zickar M.
;
de Rooij N.F.
;
Zamkotsian F.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
astronomical spectra;
astronomical techniques;
astronomical telescopes;
infrared spectroscopy;
micro-optomechanical devices;
micromirrors;
optical arrays;
100 micron;
200 micron;
MEMS;
astronomical instrumentation;
electrostatic tilting;
fill-factor;
flexure-hinge ty;
62.
MEMS Mirror Arrays for Adaptive Optics Applications
机译:
用于自适应光学应用程序的MEMS镜像阵列
作者:
Spahn O.B.
;
Cowan W.D.
;
Dagel D.J.
;
Resnick P.J.
;
Jokiel B.
;
Grossetette G.D.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
micromechanical devices;
micromirrors;
optical arrays;
optical design techniques;
optical fabrication;
0.5 mm;
61-element array;
MEMS mirror arrays;
SUMMiT Vtrade technology;
adaptive optics;
mirror fabrication;
optical design;
63.
Thermal Characterization of Liquid Core Optical Ring Resonators
机译:
液体光环谐振器的热表征
作者:
Suter J.D.
;
White I.M.
;
Zhu H.
;
Fan X.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
bioMEMS;
biosensors;
chemical sensors;
micro-optomechanical devices;
microfluidics;
nanotechnology;
optical resonators;
optical sensors;
temperature measurement;
thermo-optical effects;
whispering gallery modes;
biochemical sensor;
label-free lab-on-a-chip optical c;
64.
Analyses of Functions and Interactions of Protein Molecules by Single Fluorescent Molecular Imaging
机译:
单荧光分子成像分析蛋白质分子的功能和相互作用
作者:
Funatsu T.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
bioMEMS;
biochemistry;
biological techniques;
fluorescence;
microchannel flow;
molecular biophysics;
proteins;
Y-shaped microchannel;
chaperonin GroEL;
chaperonin reaction cycle;
fluorescent component;
infrared laser irradiation;
microdevice;
organelles;
protein encap;
65.
A Micromirror with Large Static Rotation and Piston Actuation
机译:
具有大静态旋转和活塞致动的微镜
作者:
Chiou J.C.
;
Kuo C.F.
;
Lin Y.J.
;
Shieh H.-P.D.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
microactuators;
micromirrors;
optical design techniques;
optical fabrication;
pistons;
large static rotation;
micromirror;
piston actuation;
polyMUMP fabrication techniques;
66.
Characterization of Piston-Tip-Tilt mirror pixels for scalable SLM arrays
机译:
用于可伸缩SLM阵列的活塞 - 尖端倾斜镜像像素的特征
作者:
Pardo F.
;
Simon M.E.
;
Aksyuk V.A.
;
Ryf R.
;
Lai W.Y.-C.
;
Pai C.S.
;
Klemens F.P.
;
Miner J.F.
;
Cirelli R.A.
;
Ferry E.J.
;
Bower J.E.
;
Mansfield W.M.
;
Kornblit A.
;
Sorsch T.W.
;
Taylor J.A.
;
Baker M.R.
;
Fullowan R.
;
Dyson H.
;
Gasparyan A.
;
Low Y.
;
Ramsey D.
;
A
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
electrostatic actuators;
integrated optics;
micro-optomechanical devices;
micromachining;
micromirrors;
optical arrays;
pistons;
spatial light modulators;
0.5 micron;
110 V;
120 micron;
3-structural-layer polysilicon process;
dual in-plane comb drives;
electrostatica;
67.
Thermo-Mechanical Detector Array with Optical Readout
机译:
具有光学读数的热机械探测器阵列
作者:
Torun H.
;
Ferhanoglu O.
;
Urey H.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
diffraction gratings;
infrared detectors;
micromechanical devices;
optical arrays;
optical design techniques;
MEMS bimaterial structure;
NETD;
diffraction grating;
mechanical deflection;
noise equivalent temperature difference;
optical readout;
thermo-mechanical de;
68.
Multi-Probe SPM using Fringe Patterns for a Parallel Nano Imaging
机译:
使用条纹图案的多探针SPM用于平行纳米成像
作者:
anonymous
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
CCD image sensors;
bioMEMS;
biomedical optical imaging;
nanotechnology;
optical microscopy;
scanning probe microscopy;
5 mm;
CCD camera;
MEMS technology;
anode bonding technology;
multi probes fabrication;
multiprobe SPM;
optical fringe patterns;
parallel nano imagin;
69.
Wavelength Filter with Integrated Thermal Control used as an Intracavity DWDM Laser Tuning Element
机译:
具有集成热控制的波长滤波器用作腔内DWDM激光调谐元件
作者:
McDonald M.
;
Daiber A.
;
Finot M.
;
Su Xu
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
integrated optics;
interference filters;
laser cavity resonators;
laser tuning;
optical transmitters;
optical waveguide filters;
semiconductor lasers;
silicon;
temperature control;
thermo-optical devices;
wavelength division multiplexing;
DWDM telecommunication sys;
70.
A Reconfigurable Optical Demultiplexer based on a MEMS Deformable Blazed Grating
机译:
基于MEMS可变形的闪光光栅的可重新配置的光学解复用器
作者:
Antoine C.
;
Xiang Li
;
Jen-Shiang Wang
;
Solgaard O.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
adaptive optics;
demultiplexing equipment;
diffraction gratings;
diffractive optical elements;
micro-optomechanical devices;
micromachining;
optical fibre networks;
optical tuning;
wavelength division multiplexing;
C-band;
MEMS deformable blazed grating;
WDM;
cyclic;
71.
Thermo-Pneumatically Actuated, Membrane-based Micro-Mirrors
机译:
热气动驱动,基于膜的微镜
作者:
Werber A.
;
Zappe H.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
micro-optomechanical devices;
micromirrors;
optical arrays;
pneumatic actuators;
thermo-optical devices;
membrane-based micromirrors;
mirror arrays;
piston motion;
thermo-pneumatic actuator;
tilting motion;
72.
Light Emission by Dislocations in Silicon
机译:
硅脱位发光
作者:
Reiche M.
;
Kittler M.
;
Wilhelm T.
;
Arguirov T.
;
Seifert W.
;
Yu X.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
dislocations;
electroluminescence;
elemental semiconductors;
light emitting diodes;
photoluminescence;
silicon;
wafer bonding;
D band emission;
Si-based light emitter;
dislocation;
light emission;
silicon;
spatially confirmed emitters;
wafer bonding;
73.
Compact and Stress-Released Piston Tip-Tilt Mirror
机译:
紧凑且应力释放的活塞尖端倾斜镜
作者:
Noell W.
;
Hugi A.
;
Overstolz T.
;
Waldis S.
;
Stanley R.
;
de Rooij N.F.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
adaptive optics;
beam steering;
compensation;
interference filters;
laser cavity resonators;
micro-optomechanical devices;
micromirrors;
optical design techniques;
optical fabrication;
optical scanners;
3D displacement;
MEMS;
beam steerers;
compact stress-compensatio;
74.
Focus Tracking in Time Domain Optical Coherence Tomography using Membrane Mirrors Operated Near Snap-Down
机译:
使用近距离运行的膜镜进行时域光学相干断层扫描的焦点跟踪
作者:
Dickensheets D.L.
;
Overcast M.
;
Himmer P.
;
Yang V.X.D.
;
Vitkin I.A.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
bioMEMS;
biomedical optical imaging;
micro-optomechanical devices;
micromirrors;
optical tomography;
10 kHz;
MEMS membrane mirrors;
distortion-compensation;
focus tracking;
sinusoidal motion;
time domain optical coherence tomography;
time-domain OCT;
75.
Non-Contact Bias Voltage Measurement on Analog Microelectronic Circuits via a Special Side-Electrode-Equipped Electro-Optic Tip
机译:
通过特殊侧电极的电光尖端的模拟微电子电路上的非接触偏置电压测量
作者:
Wen-Kai Kuo
;
Jen-Yu Kuo
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
analogue integrated circuits;
electro-optical devices;
integrated circuit testing;
voltage measurement;
analog microelectronic circuits;
external electro-optic probing technique;
high-speed devices;
noncontact DC bias voltage measurement;
special side-electrode-;
76.
Fully-Functional Tip-Tilt-Piston Micromirror Array
机译:
全功能尖端倾斜式微镜阵列
作者:
Milanovic V.
;
Castelino K.
;
McCor D.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
micro-optomechanical devices;
micromirrors;
optical arrays;
optical fabrication;
deflection angles;
micromirror fabrication;
piston range;
tip-tilt-piston micromirror array;
77.
Design and Fabrication of Optical MEMS Modulators with Silicon Wire Waveguide
机译:
用硅丝波导的光学MEMS调制器的设计与制造
作者:
Higo A.
;
Fujita H.
;
Toshiyoshi H.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
electrostatic actuators;
elemental semiconductors;
micro-optomechanical devices;
optical design techniques;
optical fabrication;
optical modulation;
optical waveguide components;
silicon;
Si;
electrostatic micromechanical structure;
evanescent field;
optical MEMS m;
78.
Extended Tuning Range Fabry-Perot Etalon with Doubly-Supported Beam Actuators
机译:
带双支撑梁执行器的延长调谐范围法布里 - 珀罗特龙
作者:
Milne J.
;
Dell J.
;
Keating A.
;
Faraone L.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
Fabry-Perot interferometers;
electrostatic actuators;
micro-optomechanical devices;
optical design techniques;
optical filters;
optical tuning;
MEMS-based Fabry-Perot etalon;
doubly-supported beam actuators;
electrostatic actuation;
extended tuning range;
microele;
79.
Subwavelength Optical Elements and Nanoimprint Technology for Optical MEMS/NMES
机译:
用于光学MEMS / NMES的亚波长光学元件和纳米视图技术
作者:
Chou S.Y.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
laser mode locking;
laser modes;
laser tuning;
lenses;
micro-optomechanical devices;
nanolithography;
optical beam splitters;
optical filters;
optical polarisers;
optical retarders;
photonic crystals;
NIL;
SOE filter;
SOE quarter-waveplate;
all optical switching;
antir;
80.
Micromechanic effects and their impact on the characteristics of MEMS-tunable lasers
机译:
微机械效应及其对MEMS可调激光器特性的影响
作者:
Halbritter H.
;
Sydlo C.
;
Kogel B.
;
Riemenschneider F.
;
Jatta S.
;
Hartnagel H.L.
;
Meissner P.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
chirp modulation;
laser beams;
laser cavity resonators;
laser tuning;
micro-optomechanical devices;
radiation pressure;
surface emitting lasers;
thermal noise;
MEMS-tunable lasers characteristics;
VCSEL;
laser chirp;
micromechanic effects;
parameters linewidth;
radia;
81.
Polarization Control via Tunable Nano-Structures in PDMS
机译:
通过PDMS中可调谐纳米结构进行偏振控制
作者:
Wilson B.
;
Lin L.Y.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
adaptive optics;
birefringence;
diffraction gratings;
light polarisation;
nanolithography;
nanostructured materials;
optical control;
optical fabrication;
optical polymers;
optical retarders;
optical tuning;
polymer films;
soft lithography;
deformable PDMS grating;
na;
82.
MEMS Tunable VCSEL with Concave Mirror using the Selective Polishing Method
机译:
MEMS使用选择性抛光方法的凹镜调谐vcsel
作者:
Kanbara N.
;
Tezuka S.-i.
;
Watanabe T.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
laser cavity resonators;
laser mirrors;
laser tuning;
micro-optomechanical devices;
micromachining;
optical fabrication;
polishing;
silicon-on-insulator;
surface emitting lasers;
MEMS tunable VCSEL;
Si-SiOlt;
subgt;
2lt;
/subgt;
chip bonding;
concave mirror;
metal thermo compr;
83.
XY-Stage for Scanning Media for Optical Data Storage
机译:
用于光学数据存储的扫描介质的XY级
作者:
Sasaki M.
;
Bono F.
;
Hane K.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
electrostatic actuators;
micro-optomechanical devices;
optical fabrication;
optical storage;
silicon-on-insulator;
110 micron;
115 micron;
820 micron;
90 micron;
950 micron;
SOI;
Si-SiOlt;
subgt;
2lt;
/subgt;
actuator fabrication;
electrostatic comb-drive actuator;
geometrical;
84.
Dual-Axes Confocal Fluorescence Microscopy with a Two-Dimensional MEMS Scanner
机译:
双轴共聚焦荧光显微镜与二维MEMS扫描仪
作者:
Ra H.
;
Piyawattanametha W.
;
Taguchi Y.
;
Solgaard O.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
bioMEMS;
biomedical optical imaging;
electrostatic actuators;
fluorescence;
image scanners;
micro-optomechanical devices;
optical microscopy;
silicon-on-insulator;
SOI;
blanket evaporation;
double silicon-on-insulator wafer;
dual-axes confocal fluorescence microsco;
85.
Calibration Procedure of a Multifibre Sensor for Density Measurement inside the Battery
机译:
用于电池内部密度测量的多边传感器的校准程序
作者:
Cao y Paz A.M.
;
Marcos Acevedo J.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
calibration;
compensation;
density measurement;
electrolytes;
fibre optic sensors;
lead acid batteries;
optoelectronic devices;
battery electrolyte density measurement;
lead-acid battery;
multifibre optic sensor;
optoelectronic components;
sensor calibration;
temper;
86.
Movable Guided-Mode Resonant Grating Filters by Four Bimorph Actuators for Wavelength Selective Dynamic Reflection Control
机译:
由四丝芯致动器进行动态谐振光栅滤光器,用于波长选择性动态反射控制
作者:
Kanamori Y.
;
Kitani T.
;
Hane K.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
diffraction gratings;
electron beam lithography;
electrostatic actuators;
etching;
light polarisation;
micro-optomechanical devices;
optical fabrication;
optical filters;
1508.75 nm;
MEMS actuators;
bimorph actuators;
doubly periodic resonant grating filter;
electro;
87.
CMOS-compatible Biological Surface Plasmon Resonance Nanosensor
机译:
CMOS - 兼容的生物表面等离子体共振纳米传感器
作者:
Chyan J.Y.
;
Yeh J.A.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
CMOS image sensors;
biosensors;
chemical sensors;
integrated optics;
nanoelectronics;
nanopatterning;
optical information processing;
optical sensors;
surface plasmon resonance;
CMOS image sensor;
CMOS-compatible biological SPR nanosensor;
CMOS-compatible chemical;
88.
A Combination of Fast Resonant Mode and Slow Static Deflection of SOI-PZT Actuators for MEMS Image Projection Display
机译:
用于MEMS图像投影显示的SOI-PZT执行器的快速谐振模式和慢静态偏转的组合
作者:
Masanao Tani
;
Akamatsu M.
;
Yasuda Y.
;
Fujita H.
;
Toshiyoshi H.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
arcs (electric);
image scanners;
ion plating;
micro-optomechanical devices;
microdisplays;
optical projectors;
optical scanners;
piezoelectric actuators;
silicon-on-insulator;
sputter etching;
11.2 kHz;
MEMS optical scanner;
PZT piezoelectric material;
SOI wafer;
SOI-;
89.
Micromirror-based Scan Range Enhancement in Fourier-Domain Optical Coherence Tomography
机译:
基于微镜的扫描范围增强傅里叶域光学相干性断层扫描
作者:
Kyoungsik Yu
;
Namkyoo Park
;
Daesung Lee
;
Solgaard O.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
CCD image sensors;
Fourier transform optics;
diffraction gratings;
image resolution;
micromirrors;
optical tomography;
visible spectrometers;
Fourier-domain optical coherence tomography;
grating-based spectrometers;
micromirror-based scan range enhancement;
pixela;
90.
A Photonic Crystal Waveguide Switch with a Movable Bridge Slab
机译:
具有可移动桥板的光子晶体波导开关
作者:
Umemori K.
;
Kanamori Y.
;
Hane K.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
electron beam lithography;
electrostatic actuators;
finite difference time-domain analysis;
micro-optomechanical devices;
micromachining;
optical switches;
optical waveguides;
photonic crystals;
silicon;
electron beam lithography;
electrostatic microelectro-mechan;
91.
A 3D Optical Crossconnect using Microlens Scanner with Topologically Layer Switching Architecture
机译:
使用微透镜扫描仪具有拓扑层切换架构的3D光学交叉连接
作者:
Takahashi K.
;
Kwon H.N.
;
Mita M.
;
Saruta K.
;
Lee J.H.
;
Fujita H.
;
Toshiyoshi H.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
micro-optomechanical devices;
microlenses;
optical fibre couplers;
optical fibre losses;
optical scanners;
optical switches;
telescopes;
13.8 dB;
19 micron;
23 micron;
3D optical crossconnect;
XY-stage;
lateral lens motion;
microlens scanner;
optical coupling loss;
opt;
92.
A Fabrication Method for Micro/Nanostructures
机译:
一种用于微/纳米结构的制造方法
作者:
Soon-min Seo
;
Tae-il Kim
;
Lee H.H.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
optical fabrication;
organic light emitting diodes;
fabrication technique;
micro-nanostructures;
organic light-emitting diode;
93.
A Miniature Michelson Interferometer using Vertical Bragg Mirrors on SOI
机译:
在SOI上使用垂直布拉格镜的微型迈克森干涉仪
作者:
Saadany B.
;
Bourouina T.
;
Malak M.
;
Kubota M.
;
Mita Y.
;
Khalil D.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
Michelson interferometers;
distributed Bragg reflectors;
micro-optomechanical devices;
optical beam splitters;
silicon;
silicon-on-insulator;
150 micron;
SOI;
Si-SiOlt;
subgt;
2lt;
/subgt;
beam splitter;
interferometer characteristics;
interferometer fabrication;
miniature Mi;
94.
Characteristics of Buckled Bridges and Lifted Micromirror using Film Stress
机译:
使用薄膜应力弯曲桥梁和升降微镜的特性
作者:
Sasaki M.
;
Hane K.
;
Briand D.
;
Noell W.
;
de Rooij N.
会议名称:
《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》
|
2006年
关键词:
micro-optomechanical devices;
microactuators;
micromirrors;
optical films;
buckled bridges;
film stress;
lifted micromirror;
vertical comb drive actuators;
意见反馈
回到顶部
回到首页