Integrated components using single-crystal thin-film LiNbO{sub}3

摘要

Crystal ion slicing can be used to fabricate single-crystal, microns-thick, complex-oxide thin-films for fundamentally new, integrated optic devices and structures. Using this technique, we have routinely sliced the thin-films of lithium niobate, one of the important electro-optical materials. The film thickness can be tuned from sub-micron to 10-microns. Here we describe the technology and device applications focusing on the ion-sliced lithium niobate thin-films. Demonstrated devices include electrically tunable filter, electro-optical beam scanner, Fabry-Perot filter, and very thin waveguides.