Integrated components using single-crystal thin-film LiNbO3

摘要

Crystal ion slicing can be used to fabricate single-crystal, microns-thick, complex-oxidernthin-films for fundamentally new, integrated optic devices and structures. Using this technique, wernhave routinely sliced the thin-films of lithium niobate, one of the important electro-opticalrnmaterials. The film thickness can be tuned from sub-micron to 10-microns. Here we describe therntechnology and device applications focusing on the ion-sliced lithium niobate thin-films.rnDemonstrated devices include electrically tunable filter, electro-optical beam scanner, Fabry-Perotrnfilter, and very thin waveguides.