A CMOS fully-integrated low-voltage vibratory microgyroscope

摘要

A low-voltage bulk micromachined microgyroscope is presented in this paper. An ASIC (Application Specific Integrated Circuit) is integrated on the same silicon die to minimize the parasitic effect and to ensure the high sensitivity of lie microgyroscope. Constraints on the sensitivity and actuation voltage are extremely crucial to modern low-rate high-resolution microgyroscopes used in aerospace applications.