The Intrinsic Unipolar SiO_x-based Resistive Switching Memory: Characterization, Mechanism and Applications

摘要

Intrinsic unipolar SiO_x-based Resistive-RAM (ReRAM) characterization, mechanism and applications have been investigated. We investigate device structures, material compositions and electrical characteristics to realize ReRAM cells with high ON/OFF ratio, low static power consumption, low switching power, and high readout-margin using CMOS compatible SiO_x-based materials. These ideas are combined with the use of horizontal and vertical device structure designs, composition optimization, electrical controlling and external factors for understanding resistive switching (RS) mechanism. Modeling of RS mechanism, including temperature effect, pulse response and carrier transport behaviors are performed, to develop a compact model in energy diagram, trap-level information in SiO_x RS layer, even for computer-aided design (CAD) in very-largescale integration (VLSI) design. Finally, synapse-based neuromorphic system is demonstrated in SiO_x-based ReRAM, combining with bio-inspiration and biomimetics process illustrations. This work presents the comprehensively investigation of SiO_x-based resistive switching characteristics, mechanisms, applications for future post-CMOS devices era.