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Absolute measurement of a spherical surface using a point diffraction interferometer

机译:使用点衍射干涉仪的球面的绝对测量

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Absolute measurement of spherical surface by use of point diffraction interferometer (PDI) has been studied both theoretically and experimentally. By the estimation of optical error, 10$+$MIN@3$/ $lambda rms can be expected as absolute accuracy. Experimental results with high accuracy have been obtained.
机译:通过理论上和实验研究了通过使用点衍射干涉仪(PDI)通过使用点衍射干涉仪(PDI)的绝对测量。通过估计光学误差,可以预期10 $ + $ MIN @ 3 $ / $ LMBDA RMS作为绝对精度。已经获得了高精度的实验结果。

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