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Fast searching measurement of absolute displacement based on submicron-aperture fiber point-diffraction interferometer

机译:基于亚微孔光纤点衍射干涉仪的绝对位移快速搜索测量

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摘要

The submicron-aperture fiber point-diffraction interferometer (SFPDI) can be applied to realize the measurement of three-dimensional absolute displacement within large range, in which the performance of point-diffraction wavefront and numerical iterative algorithm for displacement reconstruction determines the achievable measurement accuracy, reliability and efficiency of the system. A method based on fast searching particle swarm optimization (FS-PSO) algorithm is proposed to realize the rapid measurement of three-dimensional absolute displacement. Based on the SFPDI with two submicron-aperture fiber pairs, FS-PSO method and the corresponding model of the SFPDI, the measurement accuracy, reliability and efficiency of the SFPDI system are significantly improved, making it more feasible for practical application. The effect of point-diffraction wavefront error on the measurement is analyzed. The error of point-diffraction wavefront obtained in the experiment is in the order of 1x10(-4). (the wavelength. is 532 nm), and the corresponding displacement measurement error is smaller than 0.03 mu m. Both the numerical simulation and comparison experiments have been carried out to demonstrate the accuracy and feasibility of the proposed SFPDI system, high measurement accuracy in the order of 0.1 mu m, convergence rate (similar to 90.0%) and efficiency have been realized with the proposed method, providing a feasible way to measure three-dimensional absolute displacement in the case of no guide rail.
机译:亚微米孔径光纤点衍射干涉仪(SFPDI)可用于实现大范围内三维绝对位移的测量,其中点衍射波前的性能和位移重建的数值迭代算法决定了可达到的测量精度,系统的可靠性和效率。提出了一种基于快速搜索粒子群算法(FS-PSO)的方法来实现三维绝对位移的快速测量。基于具有两对亚微米孔径光纤对的SFPDI,FS-PSO方法和SFPDI的相应模型,可显着提高SFPDI系统的测量精度,可靠性和效率,使其更易于实际应用。分析了点衍射波阵面误差对测量的影响。实验中获得的点衍射波前误差约为1x10(-4)。 (波长是532nm),并且相应的位移测量误差小于0.03μm。进行了数值模拟和比较实验,证明了所提出的SFPDI系统的准确性和可行性,实现了0.1μm量级的高测量精度,收敛速度(约90.0%)和效率。方法,提供了一种在没有导轨的情况下测量三维绝对位移的可行方法。

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