Performances presented by zinc oxide thin films deposited by spray pyrolysis

摘要

The effect of doping and annealing atmosphere on the performances of zinc oxide thin films prepared by spray pyrolysis have been studied. The results show that the way doping influences the electrical and structural properties depends also on the characteristics of the doping element. Annealing the as-deposited films in an inert atomsphere leads to a substantial reduction in the resistivity of the films deposited and to an increase on the degree of film's crystallinity.