PRECURSOR FOR DEPOSITING ZINC OXIDE-BASED THIN FILM, METHOD OF FABICATING THEREOF AND METHOD OF DEPOSITING ZINC OXIDE-BASED THIN FILM USING THE SAME

摘要

PURPOSE: A precursor for zinc oxide thin film deposition, a manufacturing method thereof, and a zinc oxide thin film deposition method using the same are provided to deposit the pure zinc oxide thin film without impurities. CONSTITUTION: A precursor for zinc oxide thin film deposition is an organic zinc compound having a formula 1 or derivatives thereof. Formula 1 : R1CpZnR2 (R1 and R2 are the hydrogen or alkyl group (CnH2n+1). Cp is cyclopentadienyl.) The n of R1 alkanethiol is 1-3. The n of the R2 alkanethiol is 1-4. The R1 and the R2 are identical symmetrical compound or different asymmetric compounds.