Mechanical and tribological properties of ZrC/VC alloy films deposited by sputtering and pulsed laser deposition

机译：通过溅射和脉冲激光沉积沉积的Zrc / Vc合金膜的机械和摩擦学特性

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A study has been conducted on ZrC/VC alloy thin films prepared by both pulsed laser deposition (PLD) and RF magnetron sputtering. The phase formation, wear properties, and hardness of these thin films were examined. An alloy target comprised of 36

机译：通过脉冲激光沉积（PLD）和RF磁控溅射制备的ZRC / VC合金薄膜进行了研究。检查这些薄膜的相形成，磨损性能和硬度。由36个组成的合金靶标

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《Symposium on thin-films - Stresses and mechanical properties》|1998年||共6页
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W.F.Brock J.E.Krzanowski; R.E.Leuchtner; L.J.Legore; D.J.Frankel; Materials Research Society;
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中图分类薄膜的性质;
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1. Structural, mechanical and tribological properties of ZrC thin films deposited by magnetron sputtering [J] . Gilewicz Adam, Mydlowska Katarzyna, Ratajski Jerzy, Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology . 2019,第期

机译：磁控溅射沉积的ZRC薄膜的结构，机械和摩擦学特性
2. Microstructure, mechanical and tribological properties of Cr1-xAlxN films deposited by pulsed-closed field unbalanced magnetron sputtering (P-CFUBMS) [J] . Lin J, Mishra B, Moore JJ, Surface & Coatings Technology . 2006,第7期

机译：脉冲-封闭场不平衡磁控溅射（P-CFUBMS）沉积Cr1-xAlxN薄膜的微观结构，力学和摩擦学性能
3. Optical and mechanical properties of nanocrystalline ZrC thin films grown by pulsed laser deposition [J] . Craciun D., Socol G., Lambers E., Applied Surface Science . 2015,第OCTa15期

机译：脉冲激光沉积生长纳米ZrC薄膜的光学和机械性能
4. Mechanical and tribological properties of ZrC/VC alloy films deposited by sputtering and pulsed laser deposition [C] . W.F.Brock J.E.Krzanowski, R.E.Leuchtner, L.J.Legore, Symposium on thin-films - Stresses and mechanical properties . 1998

机译：通过溅射和脉冲激光沉积沉积的Zrc / Vc合金膜的机械和摩擦学特性
5. Fabrication and characterization of the electrical and optical properties of n-type thin film transparent conducting oxides deposited by neutralized ion beam sputtering and pulsed laser deposition. [D] . Vanderford, John D. 2011

机译：通过中和离子束溅射和脉冲激光沉积沉积的n型薄膜透明导电氧化物的电学和光学性质的制备和表征。
6. Electrical and Optical Properties of Nb-doped SrSnO3 Epitaxial Films Deposited by Pulsed Laser Deposition [O] . Kaifeng Li, Qiang Gao, Li Zhao, 2020

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7. Optical and mechanical properties of nanocrystalline ZrC thin films grown by pulsed laser deposition [O] . Laser Department, National Institute for Laser, Plasma, and Radiation Physics, Magurele, Romania ( host institution ), Craciun, D. ( author ), Socol, G. ( author ), 2015

机译：脉冲激光沉积生长纳米ZrC薄膜的光学和机械性能

Mechanical and tribological properties of ZrC/VC alloy films deposited by sputtering and pulsed laser deposition

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