溅射沉积铝合金基CrTiAlN涂层的结构、力学以及摩擦学特性

摘要

采用反应非平衡磁控溅射技术制备出一系列LY12铝合金基CrTiAlN多层涂层,并通过X射线衍射仪、纳米压痕仪以及多功能摩擦磨损测试仪来研究CrTiAlN涂层的结构、力学以及摩擦学特性.结果表明:CrTiAlN涂层为以TiN0.9和CrN为主要组织取向的FCC结构,N2水平和衬底负偏压对涂层的力学特性和粘附强度有显著的影响.经过优化参数,在衬底偏压-55V和中N2水平条件下,CrTiAlN涂层的结合强度为10N,显微硬度达到29.87 GPa.%A series of CrTiAIN multi-layer coatings on LY12 Al alloy substrates were prepared using unbalanced reactive magnetron sputtering system. The structural, mechanical and tribological properties of coatings were studied by X-ray diffractometry, microhardness tester and multi-functional ball-on-disc tester. The results show that the CrTiAIN coatings belong to FCC structure consisting of TiNo.9 and CrN, and the N2 level and negative bias voltage have a significant effect on CrTiAIN multi-layer coatings. The adhesion strength of optimized CrTiAIN coatings is 10 N at -55 V and medium N2 level, and its microhardness value is about 29.87 Gpa.