In this paper we present a silicon micro diaphragm pump for liquids and gases with self-priming and bubble-tolerant operation characteristics. The micropump consists of two passive check valves at the inlet and outlet port and a piezoelectrically actuated pump diaphragm. The micro fluidic device is designed to yield a pumprate of about 1ml/min for water and 3.8 ml/min for gases. The self-priming and bubble-tolerant operation mode was achieved by enlarging the compression ratio of the micropump. These measures yield on an easy-to-use device for industrial and research applications. Furthermore a miniaturized driver electronic driver for the piezoelectrically actuated micropump will be presented. With dimensions of 30 x 13,5 x 8 mm~3 the electornic allows the use of the micropump for portable and/or miniaturized analysis systems or measurement systems and is distinguished by high flexibility.
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