With the ultimate goal of creating autonomous microrobots,we have developed a new five-mask process that combinestwo polysilicon structural layers with 35 μm thick SOIstructures and a backside substrate etch. The polysilicon layersprovide 3D hinged structures, high compliance structures,and electrical wiring. The SOI structural layer yields muchstronger structures and large-force actuators. On an 8mm x3mm robot, we have demonstrated polysilicon hinges withSOI electrostatic inchworm motors. This combinationallowed us to demonstrate 200 μm out-of-plane motion of ahinged SOI robot leg. Using an off-chip controller, the robotleg was actuated through almost 30o. In addition, we havecompleted static friction tests of polysilicon flaps to moreaccurately model the frictional forces of the linkages.
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