An electrostatic, on/off silicon valve designed to controlgaseous fuel combustion by an array of such valves in a micro gasturbine engine was fabricated and fully characterized. Tested withnitrogen under room temperature, the valve opened against 10atmospheres of pressure at 136 V and delivered a flow rate of 45sccm (cm3/min). At the same pressure, the helium leak-rate wasexpected to be less than 0.03 sccm, 0.07% of the open flow rate.The valve showed no sign of failure after more than 105 cycles.
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