Laser fabrication of three-dimensional microstructures cavities and columns

摘要

A laser processing system is developed for laser microfabrication and micromachining of 3-D microstructures. We show the feasibility of laser induced chlorine etching of silicon under SiO$-2$/ and Si$-3$/N$-4$/ membranes for the formation of underlying cavities and tunnels. Deposition of tungsten and silicon columns on SiO$-x$/N$-y$//Si substrates is also demonstrated.