Fabrication of a microstructure incorporating a cavity under vacuum using a porous silicon zone in a silicon plate to form the wall of the cavity and absorb the residual gas

摘要

The fabrication of a microstructure incorporating a cavity under vacuum comprises the following stages: (a) producing, in the thickness of a first silicon plate, of a zone of porous silicon destined to totally or partially make up the wall of the cavity and able to absorb the residual gas of the cavity; and (b) assembling the first silicon plate with a second plate in a manner to produce the cavity. Independent claims are also included for: (a) a microstructure incorporating a cavity under vacuum; and (b) a sensor incorporating such a microstructure.