Three-dimensional cavity surface emitting laser structure and fabrication method thereof
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机译:三维腔面发射激光器结构及其制作方法
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摘要
A three-dimensional cavity surface emitting laser structure and a fabrication method thereof which are capable of effectively controlling the characteristic of the transverse mode by applying independent electrical field to a side wall of an active region and concentrating a current flow along, inside of the active region. The structure includes a protrusion portion of a bottom mirror region formed on a substrate, an insulation film formed in a sidewall of a laser post having an active region extended from the protrusion and a top mirror region, and a sidewall metal mirror layer electrically separated from n- type and p- type electrodes for independently applying an electric field.
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