The preparation and detection of high purity silicon tetrachloride with optical fibres level

摘要

This article showed a technology for producing high purity silicon tetrachloride with optical fiber level, which using the method of adsorption unite distillation, whose material belong to by-product of polysilicon system. This technology could remove chlorosilane, metal impurities and impurities containing hydrogen effectively. Test's results showed that most indexes can meet or exceed the standards of Evonic, indicating that product produced by this technology can meet the demand of processing optical fiber preforms what is OVD level completely. This technology has the advantages of simple process, continuous operation, and large capacity and so on, and industrialization can be realized.