A novel non-invasive diagnostic technique for parameters of glow discharge plasma

摘要

A new diagnostic technique using a quasi-optical cavity resonant system to detect parameters of glow discharge plasma is presented in this paper. In this approach, electron density was calculated from resonant parameters of the quasi-optical cavity. The reliability and repeatability of this new diagnostic technique was well approved. The key feature of the proposed method is that the experimental implementation was in real time with high stability and sensitivity.