PROBLEM TO BE SOLVED: To provide a method for uniformly and stably generating sheet type glow discharge plasma at a pressure close to an atmospheric pressure without any transition to arc discharge for efficiently carrying out surface treatment on a large-area treated base material by the minimum number of treatment.;SOLUTION: At least one side of opposite faces of a pair of cylindrical electrodes arranged face to face, the opposite faces are covered with a solid insulation body, while sheet type discharge gas is blown to a line-shaped clearance between the electrodes for generating glow discharge plasma in the clearance by impression of a sine-wave high-voltage high-frequency electric field between the electrodes under a pressure close to an atmospheric pressure, and surface treatment of the base material is carried out on the downstream side of the plasma flow. In this surface treatment method, the dimension/shape of the electrodes and their arrangement, the type/composition of the discharge gas and its blowing condition, electrostatic capacity between the electrodes, a condition of the electric field impressed between the electrodes, and the like are limited within a predetermined range.;COPYRIGHT: (C)2007,JPO&INPIT
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