Glow Discharge Mass Spectrometry for Sputtering Discharge Diagnostics

摘要

Glow discharge mass spectrometry (GDMS) is an in situ method used to determine the mass and energy of positive ions incident on the substrate during sputter deposition. In the first part of this review, we describe the sputtering glow discharge, creation of positive ions in the glow, determination of their mass and energy by GDMS, and the relationship between ionic flux and the flux of corresponding neutral species incident on the substrate. In the last section, several examples of the use of GDMS during reactive sputter deposition are presented, illustrating the strengths and limitations of this technique. (Reprints)