LCLD laser processing technology for microelectronics printed-circuit boards of new generation

摘要

This paper has dealt with the formation mechanism of nanosized metal coatings on dielectrics; the coatings were produced using laser-induced deposition from liquid phase. A diode-pumped solid-state (DPSS) laser (532 nm) was used in the deposition experiments. The laser power varied from 500 to 1500 mW with the single scanning rate up to 50 μm/s. The deposited copper structures were studied by the scanning electron microscopy (SEM) and energy-dispersive X-ray microanalysis (EDX) methods. The main attention in the paper was given to studying the effect of laser light pressure on the solid nanoparticles. There was constructed the qualitative model of nanoparticles formation during salt film decomposition at the hetero-phase "gas/liquid" border. The radiation energies thermalized by nanoparticles were calculated, and assessment of their temperature was found.