A double-pole single-throw latching MEMS switch for reconfigurable distribution frames

摘要

A double-pole single-throw latching MEMS switch is presented, which could be used as reconfiguration switches in telecommunication networks. The switch can latch into a closed state so that no energy is needed to stay in that state. The latching mechanism was operated using thermal actuators which use a polysilicon heater underneath the structural layer. Using the MetalMUMPs technology, the switch was successfully fabricated and was able to latch into the closed state. Cycling tests of 10 latching cycles showed that the switch resistance remains below 3Ω.