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Design, Test, Integration and Packaging of MEMS/MOEMS

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1.Reliability design of thermally actuated MEMS switches supported by V -Beams

机译：V-Beam支持的热驱动MEMS开关的可靠性设计
- 作者：Pustan Marius;Chiorean Radu;Birleanu Corina;Dudescu Cristian;Muller Raluca;Baracu Angela;Voicu Rodica
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- V- beams;
- mechanical characterization;
- thermal actuation;
2.Constant frequency drive method for MEMS for improved failure detection

机译：用于改进故障检测的MEMS的恒定频率驱动方法
- 作者：Jamborhazi Szilard;Rencz Marta
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- constant frequency drive;
- failure detection;
- failure mechanisms;
- resonant frequency;
- vibratory MEMS;
3.SystemC-AMS simulation of a biaxial accelerometer based on MEMS model order reduction

机译：基于MEMS模型顺序减少的基于MEMS模型顺序的双轴加速度计的Systemc-AMS模拟
- 作者：Vernay Benoit;Krust Arnaud;Schropfer Gerold;Pecheux Francois;Louerat Marie-Minerve
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- Accelerometer;
- MEMS;
- Model Order Reduction;
- Reduced-Order Model;
- System-level;
- SystemC AMS;
4.An interface circuit for time-multiplexed electrostatic drive and sample of electrostatic mems mirror

机译：用于时间多路复用静电驱动和静电MEMS镜像的接口电路
- 作者：Maruyama Satoshi;Konishi Toshifumi;Machida Katsuyuki;Fujita Hiroyuki;Toshiyoshi Hiroshi
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- a time-multiplexing manner;
- drive and sample;
- electrostatic MEMS actuator;
- interface circuit;
- two-terminal element;
5.Enabling Smart System design with the SMAC Platform

机译：使用SMAC平台启用智能系统设计
- 作者：Grosso Michelangelo;Cenni Fabio;Gangemi Giuliana;Rinaudo Salvatore;Crepaldi Marco;Sanginario Alessandro;Demarchi Danilo
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- CAD;
- EDA;
- MEMS;
- analog design;
- co-design;
- co-simulation;
- digital design;
- smart systems;
6.Fabrication of linear Fresnel lens using UV embossing and a micromachined roller mold

机译：使用紫外压花和微机械辊模制线性菲涅耳透镜的制造
- 作者：Zhang X.Q.;Liu K.;Shan X.C.
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- Fresnel lens;
- Micromachining;
- Roller Mold;
- UV imprinting;
- roll-to-roll;
7.Visible-light photocatalysis using plasmonic coupling effect for optofluidic microreactors

机译：使用等离子体微反应器的等离子体耦合效果的可见光光催化
- 作者：Furui Tan;Ning Wang;Shun Cao;Qiuqun Liang;Weixin Yu;Xuming Zhang
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- TiO;
- coupling;
- photocatalysis;
- plasmon;
8.Spatio-temporal flow pattern observations using bio-inspired hair flow sensors

机译：使用生物启发发毛传感器的时空流动模式观测
- 作者：Dagamseh Ahmad;Hmeidi Sarah;Krijnen Gijs
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- artificial hair sensorstyle;
- flow pattern;
- spatio-temporal flow;
- spider;
9.Characterization of capacitive MEMS resonators via nonlinear open-loop frequency responses

机译：通过非线性开环频率响应的电容性MEMS谐振器的表征
- 作者：Brenes A.;Juillard J.;Bourgois L.;Vinci dos Santos F.
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- Electrostatic nonlinearity;
- MEMS;
- clamped-clamped resonator;
- open-loop frequency response;
- parallel-plate resonator;
10.An ultra-low-power front-end for differential capacitive sensors

机译：用于差动电容传感器的超低功耗前端
- 作者：Kongpark Patcharee;Mailly Frederick;Latorre Laurent;Nouet Pascal
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
11.Elastic properties of graphene grown by chemical vapor deposition

机译：化学气相沉积的石墨烯的弹性性能
- 作者：Xiao Zhang;Chen Liang;Zimmermann Soren;Krohs Florian;Yuelin Wang;Tie Li
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- AFM indention;
- CVD method;
- graphene;
12.New design methodology for MEMS-electronic-package co-design and validation for inertial sensor systems

机译：MEMS-Electronic-Packic-Packic-Copy Co-Design和惯用传感器系统验证的新设计方法
- 作者：Sanginario Alessandro;Mehdaoui Alexandre;Zerbini Sarah;Schropfer Gerold;Demarchi Danilo
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
13.Design of mechanically tunable optical filters with microring resonators

机译：具有微管谐振器的机械可调谐光学滤波器的设计
- 作者：Dooyoung Hah;Bordelon John
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- actuators;
- combdrive;
- microring resonators;
- tunable optical filters;
14.Frequency analysis of electrostatic cantilever-based MEMS sensor

机译：基于静电悬臂的MEMS传感器的频率分析
- 作者：Shoaib Muhammad;Hisham Nor;Basheer Noohul;Tariq Mohammad
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- COMSOL;
- MEMS;
- Simulink;
- analytical model;
- cantilever;
- frequency shift;
15.Pin count-aware biochemical application compilation for mVLSI biochips

机译：针对MVLSI Biochips的CON计数的生物化学应用程序编译
- 作者：Raagaard Michael Lander;Pop Paul
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
16.System-level design of a readout circuit with thermostatic control for a MEMS pellistor sensor

机译：具有MEMS Pellistor传感器的读出电路的读出电路的系统级设计
- 作者：Leman O.;Srivastava M.;Hauer J.
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- MEMS;
- calorimetric gas sensor;
- catalytic combustion;
- pellistor;
- pulse-density modulation;
- sigma-delta modulator;
- thermal feedback;
17.Quantum dots/silicon nanowire coaxial photoelectrode-based dye-sensitized solar cells

机译：量子点/硅纳米线同轴光电极基染料敏化太阳能电池
- 作者：Che-Wei Hsu;You-Dar Hsieh;Gou-Jen Wang
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- Sb;
- S;
- coaxial nanorod array photoelectrode;
- dye-sensitized solar cells;
- quantum dots;
- silicon nanorod array;
18.A further study of reduced-order modeling techniques for nonlinear MEMS beams

机译：用于非线性MEMS光束的阶数建模技术进一步研究
- 作者：Juillard Jerome;Vidal-Alvarez Gabriel;Barniol Nuria
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- Reduced-order modeling;
- electrostatic nonlinearity;
19.Cycling reliability of RF-MEMS switches with gold-platinum multilayers as contact material

机译：RF-MEMS与金 - 铂多层开关的循环可靠性作为接触材料
- 作者：Mulloni Viviana;Margesin Benno;Farinelli Paola;Marcelli Romolo;De Angelis Giorgio
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- RF MEMS;
- contact resistance;
- reliability;
20.Fabrication of fabric LED array

机译：织物LED阵列的制作
- 作者：Takamatsu Seiichi;Yamashita Takahiro;Itoh Toshihiro
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- LED;
- chip mounter;
- fabric;
- ribbon;
- weaving;
21.Dispenser printed proximity sensor on fabric for creative smart fabric applications

机译：用于创意智能织物应用的织物上的分配器印花近距离传感器
- 作者：Yang Wei;Torah Russel;Yi Li;Tudor John
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- dispenser printing;
- proximity sensor;
- smart fabric;
- wearable electronics;
22.Laser curing of screen and inkjet printed conductors on flexible substrates

机译：屏幕上的激光固化和柔性基板上的喷墨印刷导体
- 作者：Yang Wei;Yi Li;Torah Russel;Tudor John
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- Laser curing;
- conductors;
- flexible substrates;
- inkjet printing;
- screen-printing;
- test structure;
23.Wafer level packaging for hermetical encapsulation of MEMS resonators

机译：用于隐蔽封装MEMS谐振器的晶圆水平包装
- 作者：Manier Charles-Alix;Zoschke Kai;Oppermann Hermann;Ruffieux David;Dalla Piazza Silvio;Suni Tommi;Dekker James;Allegato Giorgio
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- Au/Sn;
- MEMS resonator;
- TSV;
- WLP;
- interposer;
- sealing;
- vacuum;
24.Low temperature solid-liquid interdiffusion wafer and die bonding based on PVD thin Sn/Cu films

机译：基于PVD薄Sn / Cu膜的低温固液间隔晶片和模具键合
- 作者：Lemettre Sylvain;Seok Seonho;Isac Nathalie;Moulin Johan;Bosseboeuf Alain
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- Cu-Sn;
- solid-liquid interdiffusion;
- solidintermettalic;
- transient liquid phase;
- wafer bonding;
25.SU-8 microchannels for live cell dielectrophoresis improvements

机译：SU-8微通道，用于活细胞介电泳改进
- 作者：Fikar Pavel;Lissorgues Gaelle;Rousseau Lionel;Francais Olivier;Le Pioufle Bruno;Hamdi Feriel S.;Georgiev Vjaceslav;Georgiev Daniel
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- Microfabrication;
- SU-8;
- dielectrophoresis;
- microchannels;
- microfluidics;
- silanization;
26.Integrated inductors with one or two magnetic layers

机译：集成带有一个或两个磁层的电感器
- 作者：Yaya D.D.;Capraro S.;Youssouf K.;Youssouf M.K.;Bechir M.H.;Chatelon J.P.;Rousseau J.J.
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- Integrated inductor model;
- RLC model;
- eddy current;
- magnetic layer;
27.Capillary force pumping fluid for glucose oxidase enzymatic fuel cells

机译：用于葡萄糖氧化酶酶促燃料电池的毛细管力泵送液
- 作者：Yung-Fang Tsai;Hsiharng Yang;Chwen-Jen Shieh
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- capillary force;
- glucose oxidase;
- micro-fluidic channel;
- microbial fuel cell;
28.Optimization of focusing SAW propagation in piezoelectric medium for microfluidic applications

机译：微流体应用中压电介质聚焦锯传播的优化
- 作者：Abd Aziz Norazreen;Bais Badariah;Buyong Muhamad Ramdzan;Majlis Burhanuddin Yeop;Nordin Anis Nurashikin
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- annular interdigital electrodes;
- microfluidics;
- surface acoustic wave;
29.The limiting effect of electromechanical coupling in self-biased electrostatic Vibration Energy Harvester

机译：机电耦合在自偏置静电振动能量收割机中的限制效果
- 作者：Karami A.;Dudka A.;Galayko D.;Marty F.;Basset P.
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- Bennet's doubler;
- Energy harvesting;
- MEMS;
- electrostatic transduction;
30.SystemC-AMS/MDVP-based modeling for the virtual prototyping of MEMS applications

机译：基于Systemc-AMS / MDVP的MEMS应用程序虚拟原型的建模
- 作者：Cenni Fabio;Guillaume Olivier;Diaz-Nava Mario;Maehne Torsten
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
31.A miniature vibrating cantilever magnetometer

机译：一个微型振动悬臂磁力计
- 作者：Levy R.;Kayser P.
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- MEMS;
- magnetometer;
- resonator;
- thin film;
32.A double-pole single-throw latching MEMS switch for reconfigurable distribution frames

机译：用于可重新配置分布帧的双极单掷锁定MEMS开关
- 作者：Dellaert Dries;Doutreloigne Jan
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
33.Fabrication of monolithic Wheatstone bridge circuit for piezoresistive microcantilever sensor

机译：压阻式微电势传感器的单片惠斯通桥电路的制造
- 作者：Ab Rahim Rosminazuin;Nordin Anis Nurashikin;Abd Malik Noreha;Bais Badariah;Majlis Burhanuddin Yeop
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- MEMS piezoresistive microcantilever;
- Wheatstone bridge circuit;
- metal evaporation;
34.Multiphysical finite element modeling of a quartz micro-resonator thermal sensitivity

机译：石英微谐振器热敏性的多职能有限元建模
- 作者：Bourgeteau Beatrice;Levy Raphael;Lavenus Pierre;Le Traon Olivier
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
35.In-situ measurement of nanoparticle quantity in microchambers

机译：在微容ch中的纳米粒子量的原位测量
- 作者：Ender Ferenc;Vitez Andras;Sallai Gabor;Weiser Diana;Nemeth Marton
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- MNP;
- magnetic nanoparticle;
- nanoparticle concentration measurement;
- quantifization;
36.A MEMS micromirror based head-up display system

机译：基于MEMS微镜的朝上显示系统
- 作者：Ben-Mrad Ridha;Pasiliao Donn
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- MEMS;
- laser vector display;
- micro electrostatic actuation;
- micromirror;
37.A compact packaging technique for the integration of ultrasound probes in surgical needles

机译：一种紧凑的包装技术，用于在手术针中集成超声探头
- 作者：Schiavone Giuseppe;Desmulliez Marc P. Y.;Jones Thomas;Price Dennis;McPhillips Rachael;Zhen Qiu;Demore Christine E. M.;Cochran Sandy;Mahboob Syed O.;Yun Jiang;Meggs Carl;Button Tim W.
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- anisotropic interconnections;
- compact packaging;
- flexible interconnects;
- medical devices;
38.A novel multiple-shell vibratory ring gyroscope

机译：一种新型多壳振动环陀螺仪
- 作者：Abdul-Wahed Ahmed M.;Mahmoud Mohamed /A/. E.
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- SOI;
- capacitive sensing;
- electrostatic actuation;
- high performance;
- inertial sensors;
- multiple shell;
- noise floor;
- vibratory ring gyroscope;
39.Stress controlled CMUT fabrication based on a CMOS compatible sacrificial release process

机译：基于CMOS兼容牺牲释放过程的应力控制CMUT制造
- 作者：Elsaesser Linus;Friedrichs Martin;Klemm Markus;Unamuno Anartz
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- CMUT;
- Capacitive Micromachined Ultrasonic Transducers;
- amorphous TiAl;
- plate buckling;
- sacrificial release process;
- stress control;
40.Parylene-C encapsulation for polymeric cantilever stability

机译：聚合物-C用于聚合物悬臂稳定性的封装
- 作者：Maheshwari Nidhi;Chatterjee Gaurav;Vinchurkar Madhuri;Gupta Gaurav;Kshirsagar Hemant;Narsimhan K.L.;Rao V. Ramgopal
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- Cantilever;
- Parylene;
- Piezoresistive;
- SU-8;
- encapsulation;
41.Integration of commercial microspeakers in an acoustic absorbing liner

机译：商业Micropeaper在声学吸收衬垫中的集成
- 作者：Houdouin Alexandre;Martincic Emile;Lefeuvre Elie
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- Microspeaker;
- Noise absorption;
42.Micro and nanostructured substrates for DNA fibers combing by forced dewetting

机译：用于DNA纤维的微型和纳米结构底物通过强制脱水梳理
- 作者：Charlot Benoit;Teissier Roland;Schwob Etienne
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- DNA;
- PDMS;
- capillary assembly;
- laser interference lithography;
- molecular combing;
- nanograting;
43.MEMS based Inertial Measurement Units

机译：基于MEMS的惯性测量单元
- 作者：Chatterjee Gaurav;Latorre Laurent;Mailly Frederick;Nouet Pascal;Hachelef Nacim;Oudea Coumar
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- MEMS;
- accelerometer;
- gyroscope;
- inertial navigation systems;
44.A miniature piezoelectric energy harvester for air flows

机译：用于空气流动的微型压电能量收割机
- 作者：Sun H.;Zhu D.;White N.M.;Beeby S.P.
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- Piezo devices;
- aerodynamics;
- bending;
- wind energy;
45.A RF tunable Agile Filter: From component to system design

机译：RF可调敏捷过滤器：从组件到系统设计
- 作者：Pagazani J.;Lissorgues G.;Vinh-Dinh T.;Pasquet D.;Mehdaoui A.;Schro?pfer G.;Nicole P.
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- RF MEMS;
- combline filters;
- microfabrication;
- multi-physics modelling;
- system level simulation;
- tuneable capacitor;
46.Experimental study on microfluidic nanoparticle immobilization using a biomimetic method

机译：使用仿生方法对微流体纳米粒子固定的实验研究
- 作者：Xiaowen Huang;Yujiao Zhu;Chi Chung Tsoi;Xuming Zhang
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- biomimetic;
- immobilization;
- microfluidics;
- nanoparticle;
47.Fracture mechanism analysis for stealth dicing applied in wafer expansion

机译：晶圆膨胀中施防隐形切割的断裂机制分析
- 作者：Wan-Chun Chuang;Wei-Hsiang Tu;Guan-shian Lin;Jeong-Yuan Hwang;Chin-Sung Lee
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- fracture mechanism;
- stealth laser;
- wafer dicing;
48.Optimisation of a novel direct-write dispenser printer technique for improving printed smart fabric device performance

机译：一种新型直接写入分配器打印机技术的优化，用于改善印刷智能织物设备性能
- 作者：Ahmed Zeeshan;Torah Russel;Tudor John
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- Direct-write printing;
- Dispenser printing;
- E-textiles;
- Printed electronics;
- Printed smart fabrics;
- Smart fabrics;
49.Influence of nanotexturization, nanoparticles and CdTe quantum dots in the power conversion efficiency of solar cells

机译：纳米夹紧，纳米颗粒和CDTE量子点在太阳能电池电力转换效率中的影响
- 作者：Tronco-Jurado Ulises;Saucedo-Flores Emmanuel;Ruelas Ruben;Lopez Rosendo;Alvarez-Ramos Mario Enrique;Ayon Arturo /A/.
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
50.A strain-sensor-integrated test bed for electro mechanical characterization of VLSI probe

机译：一种应变传感器集成试验台，用于VLSI探针的电力机械表征
- 作者：Setoguchi Ryota;Lebrasseur Eric;Kubota Masanori;Mita Yoshio
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
51.Developing MEMS DC electric current sensor for end-use monitoring of DC power supply: Part V - corresponding relationship between polarization and output voltage

机译：开发MEMS直流电流传感器，用于直流电源的最终用途监控：第V部分 - 偏振和输出电压之间的相应关系
- 作者：Xu Yang;Yupeng Fu;Wang Dong F.;Ji Zhao;Kobayashi Takeshi;Itoh Toshihiro;Maeda Ryutaro
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
52.Screen-printed free-standing piezoelectric devices using low temperature process

机译：使用低温工艺的丝网印刷的独立压电装置
- 作者：Jamel Nursabirah;Almusallam Ahmed;Dibin Zhu;Torah Russel;Kai Yang;Tudor John;Beeby Steve
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- cantilever;
- free-standing;
- low temperature process;
- piezoelectric;
- sacrificial technology;
- screen-printing;
53.A proposed RTL design technique for highly optimized on-chip data processors of MEMS sensors

机译：一种提出的RTL设计技术，用于MEMS传感器的高度优化的片上数据处理器
- 作者：Horvath Peter;Hosszu Gabor;Kovacs Ferenc
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- AMDL;
- Algorithmic Microarchitecture Description Language;
- RTL design;
- design automation;
- digital data processing;
54.Optimization of parameters for CMOS MEMS resonant pressure sensors

机译：CMOS MEMS谐振压力传感器的参数优化
- 作者：Banerji Saoni;Madrenas Jordi;Fernandez Daniel
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- CMOS MEMS Resonant pressure sensor;
- MATLAB;
- perforated plate;
- squeeze-film air damping;
55.Development of battery-less wireless current sensor node used in power distribution panel

机译：电池配电面板中使用的电池无线电流传感器节点的开发
- 作者：Okada Hironao;Itoh Toshihiro
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- battery-less;
- power monitoring system;
- wireless sensor network;
56.CMOS compatible pinpointed fabrication of nanoscale silicon oxide islands array

机译：CMOS兼容纳米级氧化硅岛阵列的精确制备
- 作者：Pengfei Dai;Na Lu;Anran Gao;Yuelin Wang;Tie Li
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- CMOS Compatible;
- fabrication;
- island array;
- low cost;
- nanoscale;
57.Magnetic inductor model which take into account permeability and loss tangent of the magnetic material

机译：磁性电感模型考虑磁性材料的渗透率和损耗正切
- 作者：Bechir M.H.;Yaya D.D.;Kahlouche F.;Soultan M.;Youssouf K.;Capraro S.;Chatelon J.P.;Rousseau J.J.
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- Inductor model;
- magnetic layer;
58.Experimental validation of diaphragms for acoustic micro-transducers

机译：声学微传感器隔膜的实验验证
- 作者：Esteves J.;De Pasquale G.;Rufer L.;Koumela A.;Basrour S.;Soma A.
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- FEM;
- MEMS-CMOS;
- acoustics;
- diaphragms;
- experimental micromechanics;
59.Modelling of the flow rate dependent partial thermal resistance of integrated microscale cooling structures

机译：集成微尺度冷却结构的流速依赖性偏热的建模
- 作者：Takacs G.;Szabo P.G.;Bognar Gy
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- integrated cooler;
- microchannel heat sink;
- thermal transient testing;
60.Design optimisation of silicon-based MEMS sensors dedicated to bioaerosols monitoring

机译：基于硅的MEMS传感器设计优化，专用于生物溶胶监测
- 作者：Berthelot Brice;Algre Emmanuelle;Moularat Stephane;Robine Enric;Gehin Evelyne
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- Bioaresol;
- Design Method;
- MEMS mass sensor;
61.Moisture 0ensor feasibility on paper-based substrate

机译：湿度0卷制纸基底的可行性
- 作者：Balde Mamadou;Vena Arnaud;Sorli Brice
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- aluminium oxide;
- humidity sensor;
- nanoporous AAO layer;
- paper-based substrate;
- thin film;
62.Roll-to-roll thermal embossing for large area microstructure formation and application

机译：大面积微观结构形成和应用的卷 - 卷热压花
- 作者：Shan X.C.;Mohahidin Mohaime B.
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- large area structuring;
- polymer films;
- roll-to-roll;
- thermal embossing;
63.Investigation of warpage in wafer-level Molding: Measurements and FE analysis

机译：晶圆级成型翘曲研究：测量和FE分析
- 作者：Farrugia Russell;Grech Ivan;Casha Owen;Micallef Joseph;Gatt Edward;Ellul Ivan;Duca Roseanne;Borg Ingram
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- 3D packaging;
- asymmetric warpage;
- bifurcation;
- epoxy molding compound;
- wafer-level molding;
64.Two-phase Taylor-flow reduced order thermal modeling

机译：两相泰勒流量减少阶热造型
- 作者：Nemeth Merton;Poppe Andras
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- Compact thermal modeling;
- Lab-on-a-Chip;
- calorimetry;
- segmented slug flow;
65.Co-design of a MEMS-CMOS autonomous switched oscillator

机译：MEMS-CMOS自主交换振荡器的共同设计
- 作者：Torri Guilherme Brondani;Bienstman Jan;Rottenberg Xavier;Tilmans Harrie /A/. C.;Van Hoof Chris;Puers Robert
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
66.Frequency profile measurement system for microcantilever-array based gas sensor

机译：基于微电势阵列阵列的气体传感器的频率分布测量系统
- 作者：Possas Maira;Rousseau Lionel;Ghassemi Farbod;Lissorgues Gaelle;Scorsone Emmanuel;Manai Rafaa;Bergonzo Philippe
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- MEMS;
- frequency profile;
- gas sensor;
- measurement system;
- microcantilever;
67.Narrow-band switching by means of triangular meta-material resonators based on RF MEMS cantilevers in CPW configuration

机译：基于CPW配置的RF MEMS悬臂的三角形元材料谐振器窄带切换
- 作者：Lucibello A.;Proietti E.;Marcelli R.;Sardi G.M.;Bartolucci G.
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- CPW metamaterial transmission lines;
- Triangular resonators;
- metamaterial resonators;
68.Design of a 3D multilayer out-of-plane overlap electrostatic energy harvesting MEMS for medical implant applications

机译：用于医疗植入应用的3D多层外平面外静电能量收集MEMS的设计
- 作者：Risquez Sarah;Woytasik Marion;Jie Wei;Parrain Fabien;Lefeuvre Elie
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- 3D MEMS;
- electrostatic;
- energy harvesting;
- heart beat;
- inertial;
- leadless pacemaker;
69.Generation of user-defined input stimuli for virtual prototyping of MEMS sensors applications

机译：为MEMS传感器应用的虚拟原型设计生成用户定义的输入刺激
- 作者：Cenni Fabio;Lyonnard Damien;Audouin Erwan;Destenay Romain
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- MEMS;
- SystemC-AMS;
- SystemC-TLM;
- gesture recognition;
- motion tracking;
- software validation;
- virtual prototyping;
70.A novel pneumatic dispenser fabrication technique for digitally printing electroluminescent lamps on fabric

机译：一种新型气动分配器制造技术，用于在织物上进行数字印刷电致发光灯
- 作者：de Vos Marc;Torah Russel;Tudor John
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
71.Performance analysis of an RF MEMS TPoS resonator using FE modelling

机译：使用FE模型的RF MEMS TPOS谐振器的性能分析
- 作者：Farrugia Russell;Grech Ivan;Casha Owen;Micallef Joseph;Gatt Edward
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- MEMS Resonator;
- MEMS filter;
- PZT;
- Piezoelectric;
- RF MEMS;
- TPoS;
72.A FEM study on debonding process for BCB cap transfer packaging

机译：BCB帽转移包装剥离过程的FEM研究
- 作者：Seonho Seok
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- ANSYS;
- BCB Packaging;
- FEM (Finite Element Method);
- Modelling;
- Transfer;
73.Fabrication, characterization and test of acoustic sensors for detection of pollutants in aquatic environments

机译：用于检测水产环境中污染物的声学传感器的制造，表征和测试
- 作者：Lapeine David;Very Florian;Laux Didier;Ferrandis Jean-Yves;Charlot Benoit;Pascal Fabien;Combette Philippe;Giani Alain
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- Characterization;
- PZT transducers;
- Piezoelectric;
- Screen-printing;
- Ultrasound;
74.Dependence of preferred c-axis orientation on RF magnetron sputtering power for AZO/Si acoustic wave devices

机译：优选的C轴取向对AZO / SI声波装置的RF磁控溅射功率的依赖性
- 作者：Md Ralib Aliza Aini;Nordin Anis Nurashikin;Abd Malik Noreha;Othman Raihan
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- Al doped ZnO;
- RF power;
- c-axis orientation;
- sputtering;
- substrate heating;
75.How to evaluate the reliability of MEMS devices without standards

机译：如何在没有标准的情况下评估MEMS设备的可靠性
- 作者：Dhennin Jeremie;Lellouchi Djemel;Pressecq Francis
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- Accelerated Aging;
- MEMS Reliability;
- Physics of Failure;
76.Dielectric charging frequency response of MEMS switches with insulator-insulator contact

机译：具有绝缘体 - 绝缘体接触MEMS开关的介质充电频率响应
- 作者：Molinero David;Cunningham Shawn;DeReus Dana;Morris Arthur
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- Charging;
- Dielectrics;
- Micromechanical Devices;
- RF MEMS;
- Switches;
- triboelectric effects;
77.Plenary invited speakers

机译：全体会议邀请扬声器
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
78.Detecting response of square and circular Si/AlN/Al membranes transducers by Laser Vibrometry Doppler and Impedancemeter

机译：激光振动仪和ImpEdAcemeter检测方形和圆形Si / Aln / Al膜换能器的响应
- 作者：Herth Etienne;Lardet-Vieudrin Franck;Valbin Laurie;Algre Emmanuelle
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- AlN thin film;
- Aliminum nitride;
- Laser Vibrometry Doppler;
- Micro-transducers;
- piezoelectric film;
79.MOEMS for near field optical microscopy: from conception to fabrication process challenges

机译：用于近场光学显微镜的MoEms：从概念到制造过程挑战
- 作者：Falgayrettes P.;Gall-Borrut P.;Tsigara A.;Belier B.;Maillard F.
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- MOEMS;
- Near field optic;
- cantilever;
- nanoaperture;
80.Towards droplet size-aware biochemical application compilation for AM-EWOD biochips

机译：朝向液滴尺寸感知生物化学应用程序编制AM-EWOD Biochips
- 作者：Alistar Mirela;Pop Paul
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
81.Electromechanical coupling characteristics of MEMS micro cantilevers with applications

机译：MEMS微悬臂与应用的机电耦合特性
- 作者：Kuang-Shun Ou;Kuo-Shen Chen
- 会议名称：《Design, Test, Integration and Packaging of MEMS/MOEMS》 | 2015年
- Electromechanical coupling;
- dynamics;
- electrostatics;
- pull-in;
- vibration;