Low dark current small pixel large format InGaAs 2D photodetector array development at Teledyne Judson Technologies

摘要

Teledyne Judson Technologies (TJT) has been developing technology for small pixel, large format, low dark current, and low capacitance NIR/SWIR InGaAs detector arrays, aiming to produce <10μm pixels and >2Kx2K format arrays that can be operated at or near room temperature. Furthermore, TJT is now developing technology for sub-10μm pixel arrays in response to requirements for a variety of low light level (LLL) imaging applications. In this paper, we will review test data that demonstrates lower dark current density for 10-20μm pixel arrays. We will present preliminary results on the successful fabrication of test arrays with pixels as small as 5μm. In addition, a lot of effort has been made to control and reduce the detector pixel capacitance which can become another source of detector noise. TJT is also developing 4" InGaAs wafer process and now offers four different types of InGaAs 2D arrays/FPAs that are tailored to different customer requirements for dark current, capacitance, spectral response, and bias range.