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Resilience to vibration of a tuning fork MEMS gyroscope

机译:调整叉MEMS陀螺仪振动的弹性

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This paper investigates the resilience to mechanical vibration of tuning fork MEMS gyroscopes and presents the limitations of this device. We focus our study on mechanical vibrations near the first three resonance frequencies corresponding to the in-phase and anti-phase drive modes and the sense mode. This original work quantifies the rejection capability of the anti-phase mode to external vibrations in comparison to the in-phase mode resulting in a ratio of 390. In-phase frequency mechanical vibrations can result in mechanical non-linearities visible in the gyroscope response. This paper demonstrates also the strong impact of the in-phase mode on the gyroscope operation leading to failure when it is excited simultaneously with the anti-phase mode. This issue is common to tuning fork gyroscopes and only phase mode control or shift to higher frequencies can preserve normal gyroscope operation at the bandwidth 0-50 kHz.
机译:本文研究了调整叉MEMS陀螺仪的机械振动的弹性,并提出了该装置的局限性。我们专注于对应于同相和抗相位驱动模式和义型模式的前三个共振频率附近的机械振动的研究。该原始工作使抗相位模式的抑制能力与外部振动相比,与相位模式相比,导致390的比率。相位频率的机械振动可能导致陀螺仪响应中可见的机械非线性。本文还演示了同相模式对陀螺仪操作对陀螺仪操作的强烈影响,当与抗相模式同时发生时导致失效。该问题是调谐叉陀螺,并且只有相位模式控制或转移到较高频率可以保持在带宽0-50 kHz的正常陀螺操作。

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