TUNING FORK TYPE PIEZOELECTRIC VIBRATION PIECE, TUNING FORK TYPE PIEZOELECTRIC VIBRATION DEVICE, AND MANUFACTURING METHOD OF TUNING FORK PIEZOELECTRIC VIBRATION PIECE

摘要

PPROBLEM TO BE SOLVED: To provide a tuning fork type piezoelectric vibration piece which can be electromechanically bonded through a bump to a base stably, a tuning fork type piezoelectric vibration device, and a manufacturing method of the tuning fork piezoelectric vibration piece. PSOLUTION: A tuning fork type crystal vibration piece 2 comprises a first leg 21 and a second leg 22 which are vibration parts, and a base 23 where the first leg 21 and the second leg 22 are protrusively provided. The base 23 has a bonding part 27 bonded to the outside, and a pair of plating bump groups 3 are formed on the bonding part 27. The pair of plating bump groups 3 are configured by forming a plurality of plating bump points 31, and the total area of one plating bump group 3 is set to 410SP-3/SPto 610SP-3/SPmmSP2/SP. PCOPYRIGHT: (C)2010,JPO&INPIT