Deposition of Diamond-Like Carbon Films on Polyoxymethylene substrates by Magnetic Filtered Cathodic Vacuum Arc Deposition

摘要

In order to improve the abrasion property of polyoxymethylene (POM)，diamond like carbon (DLC) film was deposited on POM substrate by the method of magnetic filtered cathodic vacuum arc deposition (MFCVAD). X-ray photoelectron spectroscopy (XPS) showed that the sp3 fraction decreased with the negative bias voltages increased. According to the result of the nano-indenter, the hardness of POM plates coated with DLC films was significantly harder than POM substrate. The results of ball-on-disc tribological testing demonstrated that the hardest DLC film had the lowest friction coefficient (0.11). The evaluation of in vitro platelet adhesion test indicates that the numbers of adhered and activated platelet on the DLC film deposited under the condition of 0V and 9min were remarkably decreased compared with that of the untreated POM.