We investigated performance of square and split heaters experimentally. Four micro heaters were prepared. They included two square heaters, S20 (20μm×20μm) and S24 (24μm×24μm), and two split heaters, D22 (22μm×10μm×2) and D26 (26μm×12μm×2). Square and split heaters showed similar characteristics in electrical strengths irrespective of size and electric resistance. Heater shape seemed to have little influence on the actuating performance. Temperature on the heater surface was measured using an infrared (IR) microscope. Larger thermal spreading was observed on the split heater. The split heater is expected to manage relatively higher energy compared to the square heater of similar size.
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