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CH{sub}4/H{sub}2-RIE Induced Optical Property Degradation in GaInAsP/InP Quantum-Well Structures

机译:CH {sub} 4 / h {sub} 2-RIE诱导的GAISAPP / INP量子井结构中的光学性质劣化

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摘要

The origin and model of RIE-plasma induced optical property degradation of GaInAsP/InP quantum-well structures were investigated. Non-radiative recombination was enhanced by irradiating H{sub}2-plasma, and was found to be recovered during high temperature annealing by OMVPE.
机译:研究了RIE-等离子体诱导光学性质降解增益/ INP量子阱结构的起源和模型。通过照射H {亚} 2 - 血浆来增强非辐射重组,并发现在OMVPE的高温退火期间被回收。

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