AIN is a material investigated for a wide variety of application such as electroacoustic devices, blue diodes, thermal conductors, metal-insulator-semiconductor structures, etc. In this work thin piezoelectric AIN polycrystalline films have been grown on molybdenum electrode on silicon using dc magnetron sputter deposition in an Ar/N2 gas mixture in order to develop a micromechanical produced ultrasonic nebulizer. The films as examined by x-ray diffraction exhibited a columnar structure with a strong (002) texture. Atomic force microscopy measurements indicated a surface roughness with a rsm value of a 8?. In parallel a second set up was studied where a PZT piezo element was used instead of the AIN layer.
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机译：AIN是针对各种应用的一种材料，如电声器件，蓝色二极管，导热器，金属绝缘体 - 半导体结构等。在该工作中，使用DC磁控管在硅电极上生长在钼电极上的薄压电AIN多晶片在Ar / N 2气体混合物中溅射沉积，以便开发微机械产生的超声波雾化器。由X射线衍射检查的薄膜表现出具有强（002）纹理的柱状结构。原子力显微镜测量结果表明，具有8Ω的RSM值的表面粗糙度。在并行中，研究了第二组，其中使用PZT压电元素代替AIN层。
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