MICROMECHANICAL ULTRASONIC LIQUID NEBULIZER

摘要

A piezoelectric ZnO layer is used to set a thin silicon membrane into vibration. The possibility of applying this micromechanical structure for ultrasonic nebulization of liquids is studied. The dependence of the resulting drop distribution on membrane vibration frequency and liquid material parameters is compared with the predictions of the capillary wave theory. (C) 1997 Elsevier Science S.A. [References: 9]