Calibration of Non-Linearity of Piezo Elements and Image Distortion in Atomic Force Microscope

摘要

The beam deflection method was employed to accurately measure the deformation-voltage curves of piezo elements of the AFM scanner. Based on the non-linearity of these curves, different voltage deviations were applied to the X and Y piezos step by step during image scanning to calibrate the movement of the scanner. For comparison, some AFM images scanned by using software systems with or without voltage calibration were presented. The experiments show that the image distortion can be significantly eliminated in this way.