Switched capacitor charge pump used for low-distortion imaging in atomic force microscope

摘要

The switched capacitor charge pump (SCCP) is an effective method of linearizing charges on piezoelectric actuators and therefore constitute a significant approach to nano-positioning. In this work, it was for the first time implemented in an atomic force microscope for low-distortion imaging. Experimental results showed that the image quality was improved evidently under the SCCP drive compared with that under traditional linear voltage drive. SCANNING 37:232-236, 2015. (c) 2015 Wiley Periodicals, Inc.