Imaging method of fine particles using atomic force microscope and atomic force microscope

摘要

Problem to be solved: to provide an imaging method of fine particles using an atomic force microscope capable of measuring a particle diameter by accurately imaging fine particles and an atomic force microscope.Solution: the pool 14 for filling the liquid L, the substrate 12 disposed in a liquid state in which the liquid is immersed in the liquid, the cantilever 16 for scanning the surface of the substrate 12, and the displacement amount of the cantilever 16 during scanning are detected. An image processing unit 22 for imaging fine particles present on the surface of the substrate is provided.The pool 14 has a loop electrode 21 disposed at a position opposed to the substrate 12, and a power supply 20 for forming an electric field between the substrate 12 and the loop electrode 21.An electric field is formed between the substrate 12 and the loop electrode 21, and the surface of the substrate 12 is scanned by the cantilever 16 to image the fine particles present on the surface of the substrate 12.Diagram