ATOMIC FORCE MICROSCOPE HEAD, ESPECIALLY PERFORMING SCANNING WITHOUT NON-LINEARITY

摘要

PURPOSE: An atomic force microscope head is provided to remove errors due to movement of mirror or a gradient of a sample and provide the scanning without non-linearity by dividing one directional scanner to two different directional scanners. CONSTITUTION: A laser source(12) is used for generating laser beams. A prism is used for refracting the laser beams. A cantilever(14) includes a needle and reflects the light. One or more mirror(15) are used for reflecting the light reflected from the cantilever. A detector(16) is used for measuring an angle of the reflected light of the mirror. A laser control bar(11) is used for controlling a convergent position of the cantilever. A mirror control bar(13) is used for controlling a position of the mirror. A scanner is used for correcting a variation of the cantilever.