Although hydrogen is the main component of many gas mixtures used for plasma processing, the physics and chemistry of even pure hydrogen discharges are not yet fully understood. The complexity of this system is analyzed, including the problems posed by the electron and ion transport and chemistry, the ion heating, the chemistry of excited molecules, the non-equilibrium electron energy distribution, the non-equilibrium vibrational distribution, the surface catalytic reactions, and dual excitation frequency effects. Specific points are illustrated using the results obtained by a one-dimensional fully self-consistent hybrid model of a radio frequency capacitively coupled reactor.
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