Bulk Micromachined Pressure Sensor

机译：散装微机械压力传感器

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摘要

Bulk micromachined piezoresistive pressure sensor was designed, fabricated, packaged, and tested at RIT laboratory facility. Every aspect of the fabrication is studied thoroughly and used as an educational tool in better understanding the fabrication of MEMs devices.

机译：在RIT实验室设施的设计，制造，包装和测试，设计，制造，包装和测试散装微机械压阻传感器。彻底研究了制造的每个方面，并用作教育工具，以便更好地理解MEMS器件的制造。

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《Biennial University/Government/Industry Microelectronics Symposium》|2003年||共4页
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作者
Lynn F. Fuller; Steven Sudirgo;
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原文格式 PDF
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中图分类 TN4-53;
关键词
Bulk Micromachined; MEMS; Pressure Sensor; Fabrication;

机译：散装微机械;MEMS;压力传感器;制造;

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专利

1. High-Performance Low-Range Differential Pressure Sensors Formed With a Thin-Film Under Bulk Micromachining Technology [J] . Hongshuo Zou, Jiachou Wang, Xinxin Li Journal of Microelectromechanical Systems . 2017,第4期

机译：在批量微加工技术下用薄膜形成的高性能低量程差压传感器
2. Complementary metal-oxide semiconductor-compatible silicon carbide pressure sensors based on bulk micromachining [J] . Tang W., Zheng B., Liu L., Micro & Nano Letters, IET . 2011,第4期

机译：基于体微加工的互补金属氧化物半导体兼容碳化硅压力传感器
3. Complementary metal-oxide semiconductor-compatible silicon carbide pressure sensors based on bulk micromachining [J] . Wei Tang Baixiang Zheng Lei Liu Zhe Chen Haixia Zhang Micro & Nano Letters . 2011,第4期

机译：基于体微加工的互补金属氧化物半导体兼容碳化硅压力传感器
4. Monolithic-integrated silicon bulk-micromachined accelerometer and pressure-sensor for tire-pressure-monitoring-system (TPMS) application [C] . Wang Jiachou, Li Xinxin The 16th International Conference on olid-State Sensors, Actuators and Microsystems . 2011

机译：单片集成硅块微机械加速度计和压力传感器，用于轮胎压力监测系统（TPMS）应用
5. Micromachined optically interrogated pressure sensor and sensor array. [D] . Zhou, Jie. 2003

机译：微加工的光学询问压力传感器和传感器阵列。
6. On-Chip Integration of Pressure Plus 2-Axis (X/Z) Acceleration Composite TPMS Sensors with a Single-Sided Bulk-Micromachining Technique [O] . Jiachou Wang, Fang Song 2015

机译：采用单侧批量微加工技术的压力加2轴（X / Z）加速度复合TPMS传感器的片上集成
7. On-Chip Integration of Pressure Plus 2-Axis (X/Z) Acceleration Composite TPMS Sensors with a Single-Sided Bulk-Micromachining Technique [O] . Jiachou Wang, Fang Song 2019

机译：压力加上2轴（X / Z）加速复合TPMS传感器的片上整合，具有单面散装微机械线技术

Bulk Micromachined Pressure Sensor

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