Optical and Tribological Properties of Silicon Carbide Thin Films Grown by Reactive. DC Magnetron Sputtering

摘要

In this study, SiC films were deposited by reactive DC magnetron sputtering of high purity (99.999%) Si target in Ar/CH_4 gas mixture. Three types of substrates, AISI M2 grade high speed steel, glass, and Si (100) were used in each deposition. Films were grown with different compositions at 50 °C and 250 °C by varying (0-50 %) CH_4/Ar processing gas ratios. Microstractural properties of SiC films were characterized by cross-sectional FE-SEM (Field-Emission Scanning Electron Microscope) observations. XRD (X-Ray Diffraetometer) results indicated that films were amorphous. Friction coefficients as low as O.lwere obtained from SiC coatings against Al_2O_3 balls, according to the tribological tests. Optical investigations showed that the transparency and opacity of SiC films could easily be tailored by modifying Si and C concentrations in the coatings.