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Electromigration Performance of Fine-Pitch Copper Pillar Interconnections

机译:细间距铜柱互连的电迁移性能

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The miniaturization trend in electronic packaging continues to drive smaller and smaller chip-to-substrate interconnections with no reduction in IC operating temperature or device power in sight. These two factors (current density and temperature) make the electromigration lifetime of chip-to-package interconnections a critical consideration in package design. Of particular interest these days are the "fine pitch copper pillar" structures due to their very small size (30um dia or less). This paper presents interconnection lifetime and metallurgical data on the same which demonstrates the extreme robustness of these joints due largely to their reaching a fully reacted state in which no free solder exists in the conduction path thus providing electromigration performance like that of the base copper and intermetallic compounds. Joint resistance trends observed during stress testing are also discussed.
机译:电子包装的小型化趋势继续驱动较小且较小的芯片到基板互连,而IC工作温度或设备电力的电源不降低。这两个因素(电流密度和温度)使芯片到包装互连的电迁移寿命成为包装设计中的批判性考虑因素。这些天是特别感兴趣的是由于它们非常小的尺寸(直视或较少)的“细间距铜柱”结构。本文呈现了相互连接的寿命和冶金数据,其展示了这些关节在很大程度上由于其达到的完全反应状态而导致的极端鲁棒性,其中在传导路径中不存在游离焊料,从而提供像基础铜和金属间金属间的电迁移性能化合物。还讨论了在压力测试期间观察到的关节电阻趋势。

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